9/28/2011	12:00:04 AM	Helium valve opened
9/28/2011	12:00:17 AM	Helium valve closed
9/28/2011	12:00:23 AM	H2 MFC set to  15.000000
9/28/2011	12:02:43 AM	H2 valve opened
9/28/2011	12:02:46 AM	H2 valve closed
9/28/2011	12:03:32 AM	Helium valve opened
9/28/2011	12:03:55 AM	Helium valve closed
9/28/2011	12:04:48 AM	Helium valve opened
9/28/2011	12:04:56 AM	Helium valve closed
9/28/2011	12:05:18 AM	H2 valve opened
9/28/2011	12:05:28 AM	H2 valve closed
9/28/2011	12:06:18 AM	Helium valve opened
9/28/2011	12:06:34 AM	Helium valve closed
9/28/2011	12:07:00 AM	H2 valve opened
9/28/2011	12:07:16 AM	H2 valve closed
9/28/2011	12:12:33 AM	Main Vac valve closed
9/28/2011	12:13:40 AM	Main Vac valve opened
9/28/2011	12:15:54 AM	Main Vac valve closed
9/28/2011	12:16:36 AM	Main Vac valve opened
9/28/2011	12:16:37 AM	H2 valve opened
9/28/2011	12:16:57 AM	H2 valve closed
9/28/2011	12:20:30 AM	Recipe started at 12:20 AM
9/28/2011	12:20:30 AM	Helium valve closed
9/28/2011	12:20:30 AM	H2 valve closed
9/28/2011	12:20:30 AM	BCl3 valve closed
9/28/2011	12:20:30 AM	PH3 valve closed
9/28/2011	12:20:30 AM	SiCl4 pre valve closed
9/28/2011	12:20:30 AM	SiCl4 post valve closed
9/28/2011	12:20:30 AM	Main Vac valve closed
9/28/2011	12:20:30 AM	Bypass valve closed
9/28/2011	12:20:30 AM	Bubbler valve closed
9/28/2011	12:20:30 AM	Helium MFC set to  0.000000
9/28/2011	12:20:30 AM	H2 MFC set to  0.000000
9/28/2011	12:20:30 AM	BCl3 MFC set to  0.000000
9/28/2011	12:20:30 AM	PHl3 MFC set to  0.000000
9/28/2011	12:20:30 AM	SiCl4 MFC set to  0.000000
9/28/2011	12:20:30 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	12:20:30 AM	Tube furnace set to 0
9/28/2011	12:20:33 AM	Helium valve closed
9/28/2011	12:20:33 AM	BCl3 valve closed
9/28/2011	12:20:33 AM	PH3 valve closed
9/28/2011	12:20:33 AM	SiCl4 pre valve closed
9/28/2011	12:20:33 AM	SiCl4 post valve closed
9/28/2011	12:20:33 AM	Main Vac valve closed
9/28/2011	12:20:33 AM	Bypass valve closed
9/28/2011	12:20:33 AM	Bubbler valve closed
9/28/2011	12:20:33 AM	H2 valve opened
9/28/2011	12:20:33 AM	Helium MFC set to  0.000000
9/28/2011	12:20:33 AM	H2 MFC set to  500.000000
9/28/2011	12:20:33 AM	BCl3 MFC set to  0.000000
9/28/2011	12:20:33 AM	PHl3 MFC set to  0.000000
9/28/2011	12:20:33 AM	SiCl4 MFC set to  0.000000
9/28/2011	12:20:33 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	12:20:33 AM	Tube furnace set to 0
9/28/2011	12:21:39 AM	Helium valve closed
9/28/2011	12:21:39 AM	BCl3 valve closed
9/28/2011	12:21:39 AM	PH3 valve closed
9/28/2011	12:21:39 AM	SiCl4 pre valve closed
9/28/2011	12:21:39 AM	SiCl4 post valve closed
9/28/2011	12:21:39 AM	Main Vac valve closed
9/28/2011	12:21:39 AM	Bypass valve closed
9/28/2011	12:21:39 AM	H2 valve opened
9/28/2011	12:21:39 AM	Bubbler valve opened
9/28/2011	12:21:39 AM	Helium MFC set to  0.000000
9/28/2011	12:21:39 AM	H2 MFC set to  500.000000
9/28/2011	12:21:39 AM	BCl3 MFC set to  0.000000
9/28/2011	12:21:39 AM	PHl3 MFC set to  0.000000
9/28/2011	12:21:39 AM	SiCl4 MFC set to  0.000000
9/28/2011	12:21:39 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	12:21:39 AM	Tube furnace set to 0
9/28/2011	12:21:40 AM	Helium valve closed
9/28/2011	12:21:40 AM	BCl3 valve closed
9/28/2011	12:21:40 AM	PH3 valve closed
9/28/2011	12:21:40 AM	SiCl4 pre valve closed
9/28/2011	12:21:40 AM	SiCl4 post valve closed
9/28/2011	12:21:40 AM	Main Vac valve closed
9/28/2011	12:21:40 AM	Bypass valve closed
9/28/2011	12:21:40 AM	H2 valve opened
9/28/2011	12:21:40 AM	Bubbler valve opened
9/28/2011	12:21:40 AM	Helium MFC set to  0.000000
9/28/2011	12:21:40 AM	H2 MFC set to  500.000000
9/28/2011	12:21:40 AM	BCl3 MFC set to  0.000000
9/28/2011	12:21:40 AM	PHl3 MFC set to  0.000000
9/28/2011	12:21:40 AM	SiCl4 MFC set to  0.000000
9/28/2011	12:21:40 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	12:21:40 AM	Tube furnace set to 1000
9/28/2011	12:41:40 AM	Helium valve closed
9/28/2011	12:41:40 AM	BCl3 valve closed
9/28/2011	12:41:40 AM	PH3 valve closed
9/28/2011	12:41:40 AM	Main Vac valve closed
9/28/2011	12:41:40 AM	Bypass valve closed
9/28/2011	12:41:40 AM	H2 valve opened
9/28/2011	12:41:40 AM	SiCl4 pre valve opened
9/28/2011	12:41:40 AM	SiCl4 post valve opened
9/28/2011	12:41:40 AM	Bubbler valve opened
9/28/2011	12:41:40 AM	Helium MFC set to  0.000000
9/28/2011	12:41:40 AM	H2 MFC set to  500.000000
9/28/2011	12:41:40 AM	BCl3 MFC set to  0.000000
9/28/2011	12:41:40 AM	PHl3 MFC set to  0.000000
9/28/2011	12:41:40 AM	SiCl4 MFC set to  50.000000
9/28/2011	12:41:40 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	12:41:40 AM	Tube furnace set to 1000
9/28/2011	1:01:40 AM	Helium valve closed
9/28/2011	1:01:40 AM	BCl3 valve closed
9/28/2011	1:01:40 AM	PH3 valve closed
9/28/2011	1:01:40 AM	SiCl4 pre valve closed
9/28/2011	1:01:40 AM	SiCl4 post valve closed
9/28/2011	1:01:40 AM	Main Vac valve closed
9/28/2011	1:01:40 AM	Bypass valve closed
9/28/2011	1:01:40 AM	H2 valve opened
9/28/2011	1:01:40 AM	Bubbler valve opened
9/28/2011	1:01:40 AM	Helium MFC set to  0.000000
9/28/2011	1:01:40 AM	H2 MFC set to  500.000000
9/28/2011	1:01:40 AM	BCl3 MFC set to  0.000000
9/28/2011	1:01:40 AM	PHl3 MFC set to  0.000000
9/28/2011	1:01:40 AM	SiCl4 MFC set to  0.000000
9/28/2011	1:01:40 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	1:01:41 AM	Tube furnace set to 950
9/28/2011	1:03:19 AM	Helium valve closed
9/28/2011	1:03:19 AM	BCl3 valve closed
9/28/2011	1:03:19 AM	PH3 valve closed
9/28/2011	1:03:19 AM	SiCl4 pre valve closed
9/28/2011	1:03:19 AM	SiCl4 post valve closed
9/28/2011	1:03:19 AM	Main Vac valve closed
9/28/2011	1:03:19 AM	Bypass valve closed
9/28/2011	1:03:19 AM	H2 valve opened
9/28/2011	1:03:19 AM	Bubbler valve opened
9/28/2011	1:03:19 AM	Helium MFC set to  0.000000
9/28/2011	1:03:19 AM	H2 MFC set to  500.000000
9/28/2011	1:03:19 AM	BCl3 MFC set to  0.000000
9/28/2011	1:03:19 AM	PHl3 MFC set to  0.000000
9/28/2011	1:03:19 AM	SiCl4 MFC set to  0.000000
9/28/2011	1:03:19 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	1:03:19 AM	Tube furnace set to 850
9/28/2011	1:03:32 AM	H2 valve closed
9/28/2011	1:03:32 AM	BCl3 valve closed
9/28/2011	1:03:32 AM	PH3 valve closed
9/28/2011	1:03:32 AM	SiCl4 pre valve closed
9/28/2011	1:03:32 AM	SiCl4 post valve closed
9/28/2011	1:03:32 AM	Main Vac valve closed
9/28/2011	1:03:32 AM	Bypass valve closed
9/28/2011	1:03:32 AM	Helium valve opened
9/28/2011	1:03:32 AM	Bubbler valve opened
9/28/2011	1:03:32 AM	Helium MFC set to  500.000000
9/28/2011	1:03:32 AM	H2 MFC set to  0.000000
9/28/2011	1:03:32 AM	BCl3 MFC set to  0.000000
9/28/2011	1:03:32 AM	PHl3 MFC set to  0.000000
9/28/2011	1:03:32 AM	SiCl4 MFC set to  0.000000
9/28/2011	1:03:32 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	1:03:32 AM	Tube furnace set to 0
9/28/2011	1:10:45 AM	Helium valve closed
9/28/2011	1:10:45 AM	H2 valve closed
9/28/2011	1:10:45 AM	BCl3 valve closed
9/28/2011	1:10:45 AM	PH3 valve closed
9/28/2011	1:10:45 AM	SiCl4 pre valve closed
9/28/2011	1:10:45 AM	SiCl4 post valve closed
9/28/2011	1:10:45 AM	Main Vac valve closed
9/28/2011	1:10:45 AM	Bypass valve closed
9/28/2011	1:10:45 AM	Bubbler valve closed
9/28/2011	1:10:45 AM	Helium MFC set to  0.000000
9/28/2011	1:10:45 AM	H2 MFC set to  0.000000
9/28/2011	1:10:45 AM	BCl3 MFC set to  0.000000
9/28/2011	1:10:45 AM	PHl3 MFC set to  0.000000
9/28/2011	1:10:45 AM	SiCl4 MFC set to  0.000000
9/28/2011	1:10:45 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	1:10:45 AM	Tube furnace set to 0
9/28/2011	1:10:46 AM	Run finished at 1:10 AM
9/28/2011	1:10:51 AM	Bypass valve opened
9/28/2011	1:11:50 AM	Bypass valve closed
9/28/2011	1:11:50 AM	Main Vac valve opened
9/28/2011	7:53:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2011	7:53:05 AM	Recipe started at 7:53 AM
9/28/2011	7:53:05 AM	Helium valve closed
9/28/2011	7:53:05 AM	H2 valve closed
9/28/2011	7:53:05 AM	BCl3 valve closed
9/28/2011	7:53:05 AM	PH3 valve closed
9/28/2011	7:53:05 AM	SiCl4 pre valve closed
9/28/2011	7:53:05 AM	SiCl4 post valve closed
9/28/2011	7:53:05 AM	Main Vac valve closed
9/28/2011	7:53:05 AM	Bypass valve closed
9/28/2011	7:53:05 AM	Bubbler valve closed
9/28/2011	7:53:05 AM	Helium MFC set to  0.000000
9/28/2011	7:53:05 AM	H2 MFC set to  0.000000
9/28/2011	7:53:05 AM	BCl3 MFC set to  0.000000
9/28/2011	7:53:05 AM	PHl3 MFC set to  0.000000
9/28/2011	7:53:05 AM	SiCl4 MFC set to  0.000000
9/28/2011	7:53:05 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	7:53:05 AM	Tube furnace set to 0
9/28/2011	7:53:08 AM	H2 valve closed
9/28/2011	7:53:08 AM	BCl3 valve closed
9/28/2011	7:53:08 AM	PH3 valve closed
9/28/2011	7:53:08 AM	SiCl4 pre valve closed
9/28/2011	7:53:08 AM	SiCl4 post valve closed
9/28/2011	7:53:08 AM	Main Vac valve closed
9/28/2011	7:53:08 AM	Bypass valve closed
9/28/2011	7:53:08 AM	Bubbler valve closed
9/28/2011	7:53:08 AM	Helium valve opened
9/28/2011	7:53:08 AM	Helium MFC set to  500.000000
9/28/2011	7:53:08 AM	H2 MFC set to  0.000000
9/28/2011	7:53:08 AM	BCl3 MFC set to  0.000000
9/28/2011	7:53:08 AM	PHl3 MFC set to  0.000000
9/28/2011	7:53:08 AM	SiCl4 MFC set to  0.000000
9/28/2011	7:53:08 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	7:53:08 AM	Tube furnace set to 0
9/28/2011	7:54:14 AM	Helium valve closed
9/28/2011	7:54:14 AM	H2 valve closed
9/28/2011	7:54:14 AM	BCl3 valve closed
9/28/2011	7:54:14 AM	PH3 valve closed
9/28/2011	7:54:14 AM	SiCl4 pre valve closed
9/28/2011	7:54:14 AM	SiCl4 post valve closed
9/28/2011	7:54:14 AM	Main Vac valve closed
9/28/2011	7:54:14 AM	Bypass valve closed
9/28/2011	7:54:14 AM	Bubbler valve closed
9/28/2011	7:54:14 AM	Helium MFC set to  0.000000
9/28/2011	7:54:14 AM	H2 MFC set to  0.000000
9/28/2011	7:54:14 AM	BCl3 MFC set to  0.000000
9/28/2011	7:54:14 AM	PHl3 MFC set to  0.000000
9/28/2011	7:54:14 AM	SiCl4 MFC set to  0.000000
9/28/2011	7:54:14 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	7:54:14 AM	Tube furnace set to 0
9/28/2011	7:54:15 AM	Run finished at 7:54 AM
9/28/2011	7:54:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2011	7:59:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2011	7:59:36 AM	Recipe started at 7:59 AM
9/28/2011	7:59:36 AM	Helium valve closed
9/28/2011	7:59:36 AM	H2 valve closed
9/28/2011	7:59:36 AM	BCl3 valve closed
9/28/2011	7:59:36 AM	PH3 valve closed
9/28/2011	7:59:36 AM	SiCl4 pre valve closed
9/28/2011	7:59:36 AM	SiCl4 post valve closed
9/28/2011	7:59:36 AM	Main Vac valve closed
9/28/2011	7:59:36 AM	Bubbler valve closed
9/28/2011	7:59:36 AM	Bypass valve opened
9/28/2011	7:59:36 AM	Helium MFC set to  0.000000
9/28/2011	7:59:36 AM	H2 MFC set to  0.000000
9/28/2011	7:59:36 AM	BCl3 MFC set to  0.000000
9/28/2011	7:59:36 AM	PHl3 MFC set to  0.000000
9/28/2011	7:59:36 AM	SiCl4 MFC set to  0.000000
9/28/2011	7:59:36 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	7:59:36 AM	Tube furnace set to 0
9/28/2011	8:00:45 AM	Helium valve closed
9/28/2011	8:00:45 AM	H2 valve closed
9/28/2011	8:00:45 AM	BCl3 valve closed
9/28/2011	8:00:45 AM	PH3 valve closed
9/28/2011	8:00:45 AM	SiCl4 pre valve closed
9/28/2011	8:00:45 AM	SiCl4 post valve closed
9/28/2011	8:00:45 AM	Main Vac valve closed
9/28/2011	8:00:45 AM	Bubbler valve closed
9/28/2011	8:00:45 AM	Bypass valve opened
9/28/2011	8:00:45 AM	Helium MFC set to  0.000000
9/28/2011	8:00:45 AM	H2 MFC set to  0.000000
9/28/2011	8:00:45 AM	BCl3 MFC set to  0.000000
9/28/2011	8:00:45 AM	PHl3 MFC set to  0.000000
9/28/2011	8:00:45 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:00:45 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:00:45 AM	Tube furnace set to 0
9/28/2011	8:01:31 AM	Helium valve closed
9/28/2011	8:01:31 AM	H2 valve closed
9/28/2011	8:01:31 AM	BCl3 valve closed
9/28/2011	8:01:31 AM	PH3 valve closed
9/28/2011	8:01:31 AM	SiCl4 pre valve closed
9/28/2011	8:01:31 AM	SiCl4 post valve closed
9/28/2011	8:01:31 AM	Bypass valve closed
9/28/2011	8:01:31 AM	Bubbler valve closed
9/28/2011	8:01:31 AM	Main Vac valve opened
9/28/2011	8:01:31 AM	Helium MFC set to  0.000000
9/28/2011	8:01:31 AM	H2 MFC set to  0.000000
9/28/2011	8:01:31 AM	BCl3 MFC set to  0.000000
9/28/2011	8:01:31 AM	PHl3 MFC set to  0.000000
9/28/2011	8:01:31 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:01:31 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:01:32 AM	Tube furnace set to 0
9/28/2011	8:01:33 AM	Run finished at 8:01 AM
9/28/2011	8:01:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2011	8:02:34 AM	Recipe started at 8:02 AM
9/28/2011	8:02:35 AM	Helium valve closed
9/28/2011	8:02:35 AM	H2 valve closed
9/28/2011	8:02:35 AM	BCl3 valve closed
9/28/2011	8:02:35 AM	PH3 valve closed
9/28/2011	8:02:35 AM	SiCl4 pre valve closed
9/28/2011	8:02:35 AM	SiCl4 post valve closed
9/28/2011	8:02:35 AM	Bypass valve closed
9/28/2011	8:02:35 AM	Bubbler valve closed
9/28/2011	8:02:35 AM	Main Vac valve opened
9/28/2011	8:02:35 AM	Helium MFC set to  0.000000
9/28/2011	8:02:35 AM	H2 MFC set to  0.000000
9/28/2011	8:02:35 AM	BCl3 MFC set to  0.000000
9/28/2011	8:02:35 AM	PHl3 MFC set to  0.000000
9/28/2011	8:02:35 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:02:35 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:02:35 AM	Tube furnace set to 150
9/28/2011	8:02:41 AM	H2 valve closed
9/28/2011	8:02:41 AM	BCl3 valve closed
9/28/2011	8:02:41 AM	PH3 valve closed
9/28/2011	8:02:41 AM	SiCl4 pre valve closed
9/28/2011	8:02:41 AM	SiCl4 post valve closed
9/28/2011	8:02:41 AM	Bypass valve closed
9/28/2011	8:02:41 AM	Bubbler valve closed
9/28/2011	8:02:41 AM	Helium valve opened
9/28/2011	8:02:41 AM	Main Vac valve opened
9/28/2011	8:02:41 AM	Helium MFC set to  20.000000
9/28/2011	8:02:41 AM	H2 MFC set to  0.000000
9/28/2011	8:02:41 AM	BCl3 MFC set to  0.000000
9/28/2011	8:02:41 AM	PHl3 MFC set to  0.000000
9/28/2011	8:02:41 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:02:41 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:02:41 AM	Tube furnace set to 150
9/28/2011	8:03:11 AM	Helium valve closed
9/28/2011	8:03:11 AM	H2 valve closed
9/28/2011	8:03:11 AM	BCl3 valve closed
9/28/2011	8:03:11 AM	PH3 valve closed
9/28/2011	8:03:11 AM	SiCl4 pre valve closed
9/28/2011	8:03:11 AM	SiCl4 post valve closed
9/28/2011	8:03:11 AM	Bypass valve closed
9/28/2011	8:03:11 AM	Bubbler valve closed
9/28/2011	8:03:11 AM	Main Vac valve opened
9/28/2011	8:03:11 AM	Helium MFC set to  0.000000
9/28/2011	8:03:11 AM	H2 MFC set to  0.000000
9/28/2011	8:03:11 AM	BCl3 MFC set to  0.000000
9/28/2011	8:03:11 AM	PHl3 MFC set to  0.000000
9/28/2011	8:03:11 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:03:11 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:03:11 AM	Tube furnace set to 150
9/28/2011	8:03:41 AM	H2 valve closed
9/28/2011	8:03:41 AM	BCl3 valve closed
9/28/2011	8:03:41 AM	PH3 valve closed
9/28/2011	8:03:41 AM	SiCl4 pre valve closed
9/28/2011	8:03:41 AM	SiCl4 post valve closed
9/28/2011	8:03:41 AM	Bypass valve closed
9/28/2011	8:03:41 AM	Bubbler valve closed
9/28/2011	8:03:41 AM	Helium valve opened
9/28/2011	8:03:41 AM	Main Vac valve opened
9/28/2011	8:03:41 AM	Helium MFC set to  20.000000
9/28/2011	8:03:41 AM	H2 MFC set to  0.000000
9/28/2011	8:03:41 AM	BCl3 MFC set to  0.000000
9/28/2011	8:03:41 AM	PHl3 MFC set to  0.000000
9/28/2011	8:03:41 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:03:41 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:03:41 AM	Tube furnace set to 150
9/28/2011	8:04:11 AM	Helium valve closed
9/28/2011	8:04:11 AM	H2 valve closed
9/28/2011	8:04:11 AM	BCl3 valve closed
9/28/2011	8:04:11 AM	PH3 valve closed
9/28/2011	8:04:11 AM	SiCl4 pre valve closed
9/28/2011	8:04:11 AM	SiCl4 post valve closed
9/28/2011	8:04:11 AM	Bypass valve closed
9/28/2011	8:04:11 AM	Bubbler valve closed
9/28/2011	8:04:11 AM	Main Vac valve opened
9/28/2011	8:04:11 AM	Helium MFC set to  0.000000
9/28/2011	8:04:11 AM	H2 MFC set to  0.000000
9/28/2011	8:04:11 AM	BCl3 MFC set to  0.000000
9/28/2011	8:04:11 AM	PHl3 MFC set to  0.000000
9/28/2011	8:04:11 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:04:11 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:04:12 AM	Tube furnace set to 150
9/28/2011	8:04:42 AM	H2 valve closed
9/28/2011	8:04:42 AM	BCl3 valve closed
9/28/2011	8:04:42 AM	PH3 valve closed
9/28/2011	8:04:42 AM	SiCl4 pre valve closed
9/28/2011	8:04:42 AM	SiCl4 post valve closed
9/28/2011	8:04:42 AM	Bypass valve closed
9/28/2011	8:04:42 AM	Bubbler valve closed
9/28/2011	8:04:42 AM	Helium valve opened
9/28/2011	8:04:42 AM	Main Vac valve opened
9/28/2011	8:04:42 AM	Helium MFC set to  20.000000
9/28/2011	8:04:42 AM	H2 MFC set to  0.000000
9/28/2011	8:04:42 AM	BCl3 MFC set to  0.000000
9/28/2011	8:04:42 AM	PHl3 MFC set to  0.000000
9/28/2011	8:04:42 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:04:42 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:04:42 AM	Tube furnace set to 150
9/28/2011	8:05:12 AM	Helium valve closed
9/28/2011	8:05:12 AM	H2 valve closed
9/28/2011	8:05:12 AM	BCl3 valve closed
9/28/2011	8:05:12 AM	PH3 valve closed
9/28/2011	8:05:12 AM	SiCl4 pre valve closed
9/28/2011	8:05:12 AM	SiCl4 post valve closed
9/28/2011	8:05:12 AM	Bypass valve closed
9/28/2011	8:05:12 AM	Bubbler valve closed
9/28/2011	8:05:12 AM	Main Vac valve opened
9/28/2011	8:05:12 AM	Helium MFC set to  0.000000
9/28/2011	8:05:12 AM	H2 MFC set to  0.000000
9/28/2011	8:05:12 AM	BCl3 MFC set to  0.000000
9/28/2011	8:05:12 AM	PHl3 MFC set to  0.000000
9/28/2011	8:05:12 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:12 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:05:12 AM	Tube furnace set to 150
9/28/2011	8:05:42 AM	H2 valve closed
9/28/2011	8:05:42 AM	BCl3 valve closed
9/28/2011	8:05:42 AM	PH3 valve closed
9/28/2011	8:05:42 AM	SiCl4 pre valve closed
9/28/2011	8:05:42 AM	SiCl4 post valve closed
9/28/2011	8:05:42 AM	Bypass valve closed
9/28/2011	8:05:42 AM	Bubbler valve closed
9/28/2011	8:05:42 AM	Helium valve opened
9/28/2011	8:05:42 AM	Main Vac valve opened
9/28/2011	8:05:42 AM	Helium MFC set to  20.000000
9/28/2011	8:05:42 AM	H2 MFC set to  0.000000
9/28/2011	8:05:42 AM	BCl3 MFC set to  0.000000
9/28/2011	8:05:42 AM	PHl3 MFC set to  0.000000
9/28/2011	8:05:42 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:42 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:05:42 AM	Tube furnace set to 150
9/28/2011	8:06:12 AM	Helium valve closed
9/28/2011	8:06:12 AM	H2 valve closed
9/28/2011	8:06:12 AM	BCl3 valve closed
9/28/2011	8:06:12 AM	PH3 valve closed
9/28/2011	8:06:12 AM	SiCl4 pre valve closed
9/28/2011	8:06:12 AM	SiCl4 post valve closed
9/28/2011	8:06:12 AM	Bypass valve closed
9/28/2011	8:06:12 AM	Bubbler valve closed
9/28/2011	8:06:12 AM	Main Vac valve opened
9/28/2011	8:06:12 AM	Helium MFC set to  0.000000
9/28/2011	8:06:12 AM	H2 MFC set to  0.000000
9/28/2011	8:06:12 AM	BCl3 MFC set to  0.000000
9/28/2011	8:06:12 AM	PHl3 MFC set to  0.000000
9/28/2011	8:06:12 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:06:12 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:06:12 AM	Tube furnace set to 150
9/28/2011	8:06:42 AM	H2 valve closed
9/28/2011	8:06:42 AM	BCl3 valve closed
9/28/2011	8:06:42 AM	PH3 valve closed
9/28/2011	8:06:42 AM	SiCl4 pre valve closed
9/28/2011	8:06:42 AM	SiCl4 post valve closed
9/28/2011	8:06:42 AM	Bypass valve closed
9/28/2011	8:06:42 AM	Bubbler valve closed
9/28/2011	8:06:42 AM	Helium valve opened
9/28/2011	8:06:42 AM	Main Vac valve opened
9/28/2011	8:06:42 AM	Helium MFC set to  20.000000
9/28/2011	8:06:42 AM	H2 MFC set to  0.000000
9/28/2011	8:06:42 AM	BCl3 MFC set to  0.000000
9/28/2011	8:06:42 AM	PHl3 MFC set to  0.000000
9/28/2011	8:06:42 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:06:42 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:06:43 AM	Tube furnace set to 150
9/28/2011	8:07:13 AM	Helium valve closed
9/28/2011	8:07:13 AM	H2 valve closed
9/28/2011	8:07:13 AM	BCl3 valve closed
9/28/2011	8:07:13 AM	PH3 valve closed
9/28/2011	8:07:13 AM	SiCl4 pre valve closed
9/28/2011	8:07:13 AM	SiCl4 post valve closed
9/28/2011	8:07:13 AM	Bypass valve closed
9/28/2011	8:07:13 AM	Bubbler valve closed
9/28/2011	8:07:13 AM	Main Vac valve opened
9/28/2011	8:07:13 AM	Helium MFC set to  0.000000
9/28/2011	8:07:13 AM	H2 MFC set to  0.000000
9/28/2011	8:07:13 AM	BCl3 MFC set to  0.000000
9/28/2011	8:07:13 AM	PHl3 MFC set to  0.000000
9/28/2011	8:07:13 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:07:13 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:07:13 AM	Tube furnace set to 150
9/28/2011	8:07:43 AM	H2 valve closed
9/28/2011	8:07:43 AM	BCl3 valve closed
9/28/2011	8:07:43 AM	PH3 valve closed
9/28/2011	8:07:43 AM	SiCl4 pre valve closed
9/28/2011	8:07:43 AM	SiCl4 post valve closed
9/28/2011	8:07:43 AM	Bypass valve closed
9/28/2011	8:07:43 AM	Bubbler valve closed
9/28/2011	8:07:43 AM	Helium valve opened
9/28/2011	8:07:43 AM	Main Vac valve opened
9/28/2011	8:07:43 AM	Helium MFC set to  20.000000
9/28/2011	8:07:43 AM	H2 MFC set to  0.000000
9/28/2011	8:07:43 AM	BCl3 MFC set to  0.000000
9/28/2011	8:07:43 AM	PHl3 MFC set to  0.000000
9/28/2011	8:07:43 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:07:43 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:07:43 AM	Tube furnace set to 150
9/28/2011	8:08:13 AM	Helium valve closed
9/28/2011	8:08:13 AM	H2 valve closed
9/28/2011	8:08:13 AM	BCl3 valve closed
9/28/2011	8:08:13 AM	PH3 valve closed
9/28/2011	8:08:13 AM	SiCl4 pre valve closed
9/28/2011	8:08:13 AM	SiCl4 post valve closed
9/28/2011	8:08:13 AM	Bypass valve closed
9/28/2011	8:08:13 AM	Bubbler valve closed
9/28/2011	8:08:13 AM	Main Vac valve opened
9/28/2011	8:08:13 AM	Helium MFC set to  0.000000
9/28/2011	8:08:13 AM	H2 MFC set to  0.000000
9/28/2011	8:08:13 AM	BCl3 MFC set to  0.000000
9/28/2011	8:08:13 AM	PHl3 MFC set to  0.000000
9/28/2011	8:08:13 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:08:13 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:08:13 AM	Tube furnace set to 150
9/28/2011	8:08:43 AM	H2 valve closed
9/28/2011	8:08:43 AM	BCl3 valve closed
9/28/2011	8:08:43 AM	PH3 valve closed
9/28/2011	8:08:43 AM	SiCl4 pre valve closed
9/28/2011	8:08:43 AM	SiCl4 post valve closed
9/28/2011	8:08:43 AM	Bypass valve closed
9/28/2011	8:08:43 AM	Bubbler valve closed
9/28/2011	8:08:43 AM	Helium valve opened
9/28/2011	8:08:43 AM	Main Vac valve opened
9/28/2011	8:08:43 AM	Helium MFC set to  20.000000
9/28/2011	8:08:43 AM	H2 MFC set to  0.000000
9/28/2011	8:08:43 AM	BCl3 MFC set to  0.000000
9/28/2011	8:08:43 AM	PHl3 MFC set to  0.000000
9/28/2011	8:08:43 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:08:43 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:08:43 AM	Tube furnace set to 150
9/28/2011	8:09:13 AM	Helium valve closed
9/28/2011	8:09:13 AM	H2 valve closed
9/28/2011	8:09:13 AM	BCl3 valve closed
9/28/2011	8:09:13 AM	PH3 valve closed
9/28/2011	8:09:13 AM	SiCl4 pre valve closed
9/28/2011	8:09:13 AM	SiCl4 post valve closed
9/28/2011	8:09:13 AM	Bypass valve closed
9/28/2011	8:09:13 AM	Bubbler valve closed
9/28/2011	8:09:13 AM	Main Vac valve opened
9/28/2011	8:09:13 AM	Helium MFC set to  0.000000
9/28/2011	8:09:13 AM	H2 MFC set to  0.000000
9/28/2011	8:09:13 AM	BCl3 MFC set to  0.000000
9/28/2011	8:09:13 AM	PHl3 MFC set to  0.000000
9/28/2011	8:09:13 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:09:13 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:09:14 AM	Tube furnace set to 150
9/28/2011	8:09:44 AM	H2 valve closed
9/28/2011	8:09:44 AM	BCl3 valve closed
9/28/2011	8:09:44 AM	PH3 valve closed
9/28/2011	8:09:44 AM	SiCl4 pre valve closed
9/28/2011	8:09:44 AM	SiCl4 post valve closed
9/28/2011	8:09:44 AM	Bypass valve closed
9/28/2011	8:09:44 AM	Bubbler valve closed
9/28/2011	8:09:44 AM	Helium valve opened
9/28/2011	8:09:44 AM	Main Vac valve opened
9/28/2011	8:09:44 AM	Helium MFC set to  20.000000
9/28/2011	8:09:44 AM	H2 MFC set to  0.000000
9/28/2011	8:09:44 AM	BCl3 MFC set to  0.000000
9/28/2011	8:09:44 AM	PHl3 MFC set to  0.000000
9/28/2011	8:09:44 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:09:44 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:09:44 AM	Tube furnace set to 150
9/28/2011	8:10:14 AM	Helium valve closed
9/28/2011	8:10:14 AM	H2 valve closed
9/28/2011	8:10:14 AM	BCl3 valve closed
9/28/2011	8:10:14 AM	PH3 valve closed
9/28/2011	8:10:14 AM	SiCl4 pre valve closed
9/28/2011	8:10:14 AM	SiCl4 post valve closed
9/28/2011	8:10:14 AM	Bypass valve closed
9/28/2011	8:10:14 AM	Bubbler valve closed
9/28/2011	8:10:14 AM	Main Vac valve opened
9/28/2011	8:10:14 AM	Helium MFC set to  0.000000
9/28/2011	8:10:14 AM	H2 MFC set to  0.000000
9/28/2011	8:10:14 AM	BCl3 MFC set to  0.000000
9/28/2011	8:10:14 AM	PHl3 MFC set to  0.000000
9/28/2011	8:10:14 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:10:14 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:10:14 AM	Tube furnace set to 150
9/28/2011	8:10:44 AM	H2 valve closed
9/28/2011	8:10:44 AM	BCl3 valve closed
9/28/2011	8:10:44 AM	PH3 valve closed
9/28/2011	8:10:44 AM	SiCl4 pre valve closed
9/28/2011	8:10:44 AM	SiCl4 post valve closed
9/28/2011	8:10:44 AM	Bypass valve closed
9/28/2011	8:10:44 AM	Bubbler valve closed
9/28/2011	8:10:44 AM	Helium valve opened
9/28/2011	8:10:44 AM	Main Vac valve opened
9/28/2011	8:10:44 AM	Helium MFC set to  20.000000
9/28/2011	8:10:44 AM	H2 MFC set to  0.000000
9/28/2011	8:10:44 AM	BCl3 MFC set to  0.000000
9/28/2011	8:10:44 AM	PHl3 MFC set to  0.000000
9/28/2011	8:10:44 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:10:44 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:10:44 AM	Tube furnace set to 150
9/28/2011	8:11:14 AM	Helium valve closed
9/28/2011	8:11:14 AM	H2 valve closed
9/28/2011	8:11:14 AM	BCl3 valve closed
9/28/2011	8:11:14 AM	PH3 valve closed
9/28/2011	8:11:14 AM	SiCl4 pre valve closed
9/28/2011	8:11:14 AM	SiCl4 post valve closed
9/28/2011	8:11:14 AM	Bypass valve closed
9/28/2011	8:11:14 AM	Bubbler valve closed
9/28/2011	8:11:14 AM	Main Vac valve opened
9/28/2011	8:11:14 AM	Helium MFC set to  0.000000
9/28/2011	8:11:14 AM	H2 MFC set to  0.000000
9/28/2011	8:11:14 AM	BCl3 MFC set to  0.000000
9/28/2011	8:11:14 AM	PHl3 MFC set to  0.000000
9/28/2011	8:11:14 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:11:14 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:11:14 AM	Tube furnace set to 150
9/28/2011	8:11:44 AM	H2 valve closed
9/28/2011	8:11:44 AM	BCl3 valve closed
9/28/2011	8:11:44 AM	PH3 valve closed
9/28/2011	8:11:44 AM	SiCl4 pre valve closed
9/28/2011	8:11:44 AM	SiCl4 post valve closed
9/28/2011	8:11:44 AM	Bypass valve closed
9/28/2011	8:11:44 AM	Bubbler valve closed
9/28/2011	8:11:44 AM	Helium valve opened
9/28/2011	8:11:44 AM	Main Vac valve opened
9/28/2011	8:11:44 AM	Helium MFC set to  20.000000
9/28/2011	8:11:44 AM	H2 MFC set to  0.000000
9/28/2011	8:11:44 AM	BCl3 MFC set to  0.000000
9/28/2011	8:11:44 AM	PHl3 MFC set to  0.000000
9/28/2011	8:11:44 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:11:44 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:11:45 AM	Tube furnace set to 150
9/28/2011	8:12:15 AM	Helium valve closed
9/28/2011	8:12:15 AM	H2 valve closed
9/28/2011	8:12:15 AM	BCl3 valve closed
9/28/2011	8:12:15 AM	PH3 valve closed
9/28/2011	8:12:15 AM	SiCl4 pre valve closed
9/28/2011	8:12:15 AM	SiCl4 post valve closed
9/28/2011	8:12:15 AM	Bypass valve closed
9/28/2011	8:12:15 AM	Bubbler valve closed
9/28/2011	8:12:15 AM	Main Vac valve opened
9/28/2011	8:12:15 AM	Helium MFC set to  0.000000
9/28/2011	8:12:15 AM	H2 MFC set to  0.000000
9/28/2011	8:12:15 AM	BCl3 MFC set to  0.000000
9/28/2011	8:12:15 AM	PHl3 MFC set to  0.000000
9/28/2011	8:12:15 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:12:15 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:12:15 AM	Tube furnace set to 150
9/28/2011	8:12:16 AM	Run finished at 8:12 AM
9/28/2011	8:12:47 AM	Recipe started at 8:12 AM
9/28/2011	8:12:48 AM	Helium valve closed
9/28/2011	8:12:48 AM	H2 valve closed
9/28/2011	8:12:48 AM	BCl3 valve closed
9/28/2011	8:12:48 AM	PH3 valve closed
9/28/2011	8:12:48 AM	SiCl4 pre valve closed
9/28/2011	8:12:48 AM	SiCl4 post valve closed
9/28/2011	8:12:48 AM	Bypass valve closed
9/28/2011	8:12:48 AM	Bubbler valve closed
9/28/2011	8:12:48 AM	Main Vac valve opened
9/28/2011	8:12:48 AM	Helium MFC set to  0.000000
9/28/2011	8:12:48 AM	H2 MFC set to  0.000000
9/28/2011	8:12:48 AM	BCl3 MFC set to  0.000000
9/28/2011	8:12:48 AM	PHl3 MFC set to  0.000000
9/28/2011	8:12:48 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:12:48 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:12:48 AM	Tube furnace set to 150
9/28/2011	8:13:18 AM	H2 valve closed
9/28/2011	8:13:18 AM	BCl3 valve closed
9/28/2011	8:13:18 AM	PH3 valve closed
9/28/2011	8:13:18 AM	SiCl4 pre valve closed
9/28/2011	8:13:18 AM	SiCl4 post valve closed
9/28/2011	8:13:18 AM	Bypass valve closed
9/28/2011	8:13:18 AM	Bubbler valve closed
9/28/2011	8:13:18 AM	Helium valve opened
9/28/2011	8:13:18 AM	Main Vac valve opened
9/28/2011	8:13:18 AM	Helium MFC set to  20.000000
9/28/2011	8:13:18 AM	H2 MFC set to  0.000000
9/28/2011	8:13:18 AM	BCl3 MFC set to  0.000000
9/28/2011	8:13:18 AM	PHl3 MFC set to  0.000000
9/28/2011	8:13:18 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:13:18 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:13:18 AM	Tube furnace set to 150
9/28/2011	8:13:48 AM	Helium valve closed
9/28/2011	8:13:48 AM	H2 valve closed
9/28/2011	8:13:48 AM	BCl3 valve closed
9/28/2011	8:13:48 AM	PH3 valve closed
9/28/2011	8:13:48 AM	SiCl4 pre valve closed
9/28/2011	8:13:48 AM	SiCl4 post valve closed
9/28/2011	8:13:48 AM	Bypass valve closed
9/28/2011	8:13:48 AM	Bubbler valve closed
9/28/2011	8:13:48 AM	Main Vac valve opened
9/28/2011	8:13:48 AM	Helium MFC set to  0.000000
9/28/2011	8:13:48 AM	H2 MFC set to  0.000000
9/28/2011	8:13:48 AM	BCl3 MFC set to  0.000000
9/28/2011	8:13:48 AM	PHl3 MFC set to  0.000000
9/28/2011	8:13:48 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:13:48 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:13:48 AM	Tube furnace set to 150
9/28/2011	8:14:18 AM	H2 valve closed
9/28/2011	8:14:18 AM	BCl3 valve closed
9/28/2011	8:14:18 AM	PH3 valve closed
9/28/2011	8:14:18 AM	SiCl4 pre valve closed
9/28/2011	8:14:18 AM	SiCl4 post valve closed
9/28/2011	8:14:18 AM	Bypass valve closed
9/28/2011	8:14:18 AM	Bubbler valve closed
9/28/2011	8:14:18 AM	Helium valve opened
9/28/2011	8:14:18 AM	Main Vac valve opened
9/28/2011	8:14:18 AM	Helium MFC set to  20.000000
9/28/2011	8:14:18 AM	H2 MFC set to  0.000000
9/28/2011	8:14:18 AM	BCl3 MFC set to  0.000000
9/28/2011	8:14:18 AM	PHl3 MFC set to  0.000000
9/28/2011	8:14:18 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:14:18 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:14:18 AM	Tube furnace set to 150
9/28/2011	8:14:48 AM	Helium valve closed
9/28/2011	8:14:48 AM	H2 valve closed
9/28/2011	8:14:48 AM	BCl3 valve closed
9/28/2011	8:14:48 AM	PH3 valve closed
9/28/2011	8:14:48 AM	SiCl4 pre valve closed
9/28/2011	8:14:48 AM	SiCl4 post valve closed
9/28/2011	8:14:48 AM	Bypass valve closed
9/28/2011	8:14:48 AM	Bubbler valve closed
9/28/2011	8:14:48 AM	Main Vac valve opened
9/28/2011	8:14:48 AM	Helium MFC set to  0.000000
9/28/2011	8:14:48 AM	H2 MFC set to  0.000000
9/28/2011	8:14:48 AM	BCl3 MFC set to  0.000000
9/28/2011	8:14:48 AM	PHl3 MFC set to  0.000000
9/28/2011	8:14:48 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:14:48 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:14:48 AM	Tube furnace set to 150
9/28/2011	8:15:19 AM	H2 valve closed
9/28/2011	8:15:19 AM	BCl3 valve closed
9/28/2011	8:15:19 AM	PH3 valve closed
9/28/2011	8:15:19 AM	SiCl4 pre valve closed
9/28/2011	8:15:19 AM	SiCl4 post valve closed
9/28/2011	8:15:19 AM	Bypass valve closed
9/28/2011	8:15:19 AM	Bubbler valve closed
9/28/2011	8:15:19 AM	Helium valve opened
9/28/2011	8:15:19 AM	Main Vac valve opened
9/28/2011	8:15:19 AM	Helium MFC set to  20.000000
9/28/2011	8:15:19 AM	H2 MFC set to  0.000000
9/28/2011	8:15:19 AM	BCl3 MFC set to  0.000000
9/28/2011	8:15:19 AM	PHl3 MFC set to  0.000000
9/28/2011	8:15:19 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:15:19 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:15:19 AM	Tube furnace set to 150
9/28/2011	8:15:49 AM	Helium valve closed
9/28/2011	8:15:49 AM	H2 valve closed
9/28/2011	8:15:49 AM	BCl3 valve closed
9/28/2011	8:15:49 AM	PH3 valve closed
9/28/2011	8:15:49 AM	SiCl4 pre valve closed
9/28/2011	8:15:49 AM	SiCl4 post valve closed
9/28/2011	8:15:49 AM	Bypass valve closed
9/28/2011	8:15:49 AM	Bubbler valve closed
9/28/2011	8:15:49 AM	Main Vac valve opened
9/28/2011	8:15:49 AM	Helium MFC set to  0.000000
9/28/2011	8:15:49 AM	H2 MFC set to  0.000000
9/28/2011	8:15:49 AM	BCl3 MFC set to  0.000000
9/28/2011	8:15:49 AM	PHl3 MFC set to  0.000000
9/28/2011	8:15:49 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:15:49 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:15:49 AM	Tube furnace set to 150
9/28/2011	8:16:19 AM	H2 valve closed
9/28/2011	8:16:19 AM	BCl3 valve closed
9/28/2011	8:16:19 AM	PH3 valve closed
9/28/2011	8:16:19 AM	SiCl4 pre valve closed
9/28/2011	8:16:19 AM	SiCl4 post valve closed
9/28/2011	8:16:19 AM	Bypass valve closed
9/28/2011	8:16:19 AM	Bubbler valve closed
9/28/2011	8:16:19 AM	Helium valve opened
9/28/2011	8:16:19 AM	Main Vac valve opened
9/28/2011	8:16:19 AM	Helium MFC set to  20.000000
9/28/2011	8:16:19 AM	H2 MFC set to  0.000000
9/28/2011	8:16:19 AM	BCl3 MFC set to  0.000000
9/28/2011	8:16:19 AM	PHl3 MFC set to  0.000000
9/28/2011	8:16:19 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:16:19 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:16:19 AM	Tube furnace set to 150
9/28/2011	8:16:49 AM	Helium valve closed
9/28/2011	8:16:49 AM	H2 valve closed
9/28/2011	8:16:49 AM	BCl3 valve closed
9/28/2011	8:16:49 AM	PH3 valve closed
9/28/2011	8:16:49 AM	SiCl4 pre valve closed
9/28/2011	8:16:49 AM	SiCl4 post valve closed
9/28/2011	8:16:49 AM	Bypass valve closed
9/28/2011	8:16:49 AM	Bubbler valve closed
9/28/2011	8:16:49 AM	Main Vac valve opened
9/28/2011	8:16:49 AM	Helium MFC set to  0.000000
9/28/2011	8:16:49 AM	H2 MFC set to  0.000000
9/28/2011	8:16:49 AM	BCl3 MFC set to  0.000000
9/28/2011	8:16:49 AM	PHl3 MFC set to  0.000000
9/28/2011	8:16:49 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:16:49 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:16:49 AM	Tube furnace set to 150
9/28/2011	8:17:19 AM	H2 valve closed
9/28/2011	8:17:19 AM	BCl3 valve closed
9/28/2011	8:17:19 AM	PH3 valve closed
9/28/2011	8:17:19 AM	SiCl4 pre valve closed
9/28/2011	8:17:19 AM	SiCl4 post valve closed
9/28/2011	8:17:19 AM	Bypass valve closed
9/28/2011	8:17:19 AM	Bubbler valve closed
9/28/2011	8:17:19 AM	Helium valve opened
9/28/2011	8:17:19 AM	Main Vac valve opened
9/28/2011	8:17:19 AM	Helium MFC set to  20.000000
9/28/2011	8:17:19 AM	H2 MFC set to  0.000000
9/28/2011	8:17:19 AM	BCl3 MFC set to  0.000000
9/28/2011	8:17:19 AM	PHl3 MFC set to  0.000000
9/28/2011	8:17:19 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:17:19 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:17:20 AM	Tube furnace set to 150
9/28/2011	8:17:50 AM	Helium valve closed
9/28/2011	8:17:50 AM	H2 valve closed
9/28/2011	8:17:50 AM	BCl3 valve closed
9/28/2011	8:17:50 AM	PH3 valve closed
9/28/2011	8:17:50 AM	SiCl4 pre valve closed
9/28/2011	8:17:50 AM	SiCl4 post valve closed
9/28/2011	8:17:50 AM	Bypass valve closed
9/28/2011	8:17:50 AM	Bubbler valve closed
9/28/2011	8:17:50 AM	Main Vac valve opened
9/28/2011	8:17:50 AM	Helium MFC set to  0.000000
9/28/2011	8:17:50 AM	H2 MFC set to  0.000000
9/28/2011	8:17:50 AM	BCl3 MFC set to  0.000000
9/28/2011	8:17:50 AM	PHl3 MFC set to  0.000000
9/28/2011	8:17:50 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:17:50 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:17:50 AM	Tube furnace set to 150
9/28/2011	8:18:20 AM	H2 valve closed
9/28/2011	8:18:20 AM	BCl3 valve closed
9/28/2011	8:18:20 AM	PH3 valve closed
9/28/2011	8:18:20 AM	SiCl4 pre valve closed
9/28/2011	8:18:20 AM	SiCl4 post valve closed
9/28/2011	8:18:20 AM	Bypass valve closed
9/28/2011	8:18:20 AM	Bubbler valve closed
9/28/2011	8:18:20 AM	Helium valve opened
9/28/2011	8:18:20 AM	Main Vac valve opened
9/28/2011	8:18:20 AM	Helium MFC set to  20.000000
9/28/2011	8:18:20 AM	H2 MFC set to  0.000000
9/28/2011	8:18:20 AM	BCl3 MFC set to  0.000000
9/28/2011	8:18:20 AM	PHl3 MFC set to  0.000000
9/28/2011	8:18:20 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:18:20 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:18:20 AM	Tube furnace set to 150
9/28/2011	8:18:50 AM	Helium valve closed
9/28/2011	8:18:50 AM	H2 valve closed
9/28/2011	8:18:50 AM	BCl3 valve closed
9/28/2011	8:18:50 AM	PH3 valve closed
9/28/2011	8:18:50 AM	SiCl4 pre valve closed
9/28/2011	8:18:50 AM	SiCl4 post valve closed
9/28/2011	8:18:50 AM	Bypass valve closed
9/28/2011	8:18:50 AM	Bubbler valve closed
9/28/2011	8:18:50 AM	Main Vac valve opened
9/28/2011	8:18:50 AM	Helium MFC set to  0.000000
9/28/2011	8:18:50 AM	H2 MFC set to  0.000000
9/28/2011	8:18:50 AM	BCl3 MFC set to  0.000000
9/28/2011	8:18:50 AM	PHl3 MFC set to  0.000000
9/28/2011	8:18:50 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:18:50 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:18:50 AM	Tube furnace set to 150
9/28/2011	8:19:20 AM	H2 valve closed
9/28/2011	8:19:20 AM	BCl3 valve closed
9/28/2011	8:19:20 AM	PH3 valve closed
9/28/2011	8:19:20 AM	SiCl4 pre valve closed
9/28/2011	8:19:20 AM	SiCl4 post valve closed
9/28/2011	8:19:20 AM	Bypass valve closed
9/28/2011	8:19:20 AM	Bubbler valve closed
9/28/2011	8:19:20 AM	Helium valve opened
9/28/2011	8:19:20 AM	Main Vac valve opened
9/28/2011	8:19:20 AM	Helium MFC set to  20.000000
9/28/2011	8:19:20 AM	H2 MFC set to  0.000000
9/28/2011	8:19:20 AM	BCl3 MFC set to  0.000000
9/28/2011	8:19:20 AM	PHl3 MFC set to  0.000000
9/28/2011	8:19:20 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:19:20 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:19:20 AM	Tube furnace set to 150
9/28/2011	8:19:50 AM	Helium valve closed
9/28/2011	8:19:50 AM	H2 valve closed
9/28/2011	8:19:50 AM	BCl3 valve closed
9/28/2011	8:19:50 AM	PH3 valve closed
9/28/2011	8:19:50 AM	SiCl4 pre valve closed
9/28/2011	8:19:50 AM	SiCl4 post valve closed
9/28/2011	8:19:50 AM	Bypass valve closed
9/28/2011	8:19:50 AM	Bubbler valve closed
9/28/2011	8:19:50 AM	Main Vac valve opened
9/28/2011	8:19:50 AM	Helium MFC set to  0.000000
9/28/2011	8:19:50 AM	H2 MFC set to  0.000000
9/28/2011	8:19:50 AM	BCl3 MFC set to  0.000000
9/28/2011	8:19:50 AM	PHl3 MFC set to  0.000000
9/28/2011	8:19:50 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:19:50 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:19:51 AM	Tube furnace set to 150
9/28/2011	8:20:21 AM	H2 valve closed
9/28/2011	8:20:21 AM	BCl3 valve closed
9/28/2011	8:20:21 AM	PH3 valve closed
9/28/2011	8:20:21 AM	SiCl4 pre valve closed
9/28/2011	8:20:21 AM	SiCl4 post valve closed
9/28/2011	8:20:21 AM	Bypass valve closed
9/28/2011	8:20:21 AM	Bubbler valve closed
9/28/2011	8:20:21 AM	Helium valve opened
9/28/2011	8:20:21 AM	Main Vac valve opened
9/28/2011	8:20:21 AM	Helium MFC set to  20.000000
9/28/2011	8:20:21 AM	H2 MFC set to  0.000000
9/28/2011	8:20:21 AM	BCl3 MFC set to  0.000000
9/28/2011	8:20:21 AM	PHl3 MFC set to  0.000000
9/28/2011	8:20:21 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:20:21 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:20:21 AM	Tube furnace set to 150
9/28/2011	8:20:51 AM	Helium valve closed
9/28/2011	8:20:51 AM	H2 valve closed
9/28/2011	8:20:51 AM	BCl3 valve closed
9/28/2011	8:20:51 AM	PH3 valve closed
9/28/2011	8:20:51 AM	SiCl4 pre valve closed
9/28/2011	8:20:51 AM	SiCl4 post valve closed
9/28/2011	8:20:51 AM	Bypass valve closed
9/28/2011	8:20:51 AM	Bubbler valve closed
9/28/2011	8:20:51 AM	Main Vac valve opened
9/28/2011	8:20:51 AM	Helium MFC set to  0.000000
9/28/2011	8:20:51 AM	H2 MFC set to  0.000000
9/28/2011	8:20:51 AM	BCl3 MFC set to  0.000000
9/28/2011	8:20:51 AM	PHl3 MFC set to  0.000000
9/28/2011	8:20:51 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:20:51 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:20:51 AM	Tube furnace set to 150
9/28/2011	8:21:21 AM	H2 valve closed
9/28/2011	8:21:21 AM	BCl3 valve closed
9/28/2011	8:21:21 AM	PH3 valve closed
9/28/2011	8:21:21 AM	SiCl4 pre valve closed
9/28/2011	8:21:21 AM	SiCl4 post valve closed
9/28/2011	8:21:21 AM	Bypass valve closed
9/28/2011	8:21:21 AM	Bubbler valve closed
9/28/2011	8:21:21 AM	Helium valve opened
9/28/2011	8:21:21 AM	Main Vac valve opened
9/28/2011	8:21:21 AM	Helium MFC set to  20.000000
9/28/2011	8:21:21 AM	H2 MFC set to  0.000000
9/28/2011	8:21:21 AM	BCl3 MFC set to  0.000000
9/28/2011	8:21:21 AM	PHl3 MFC set to  0.000000
9/28/2011	8:21:21 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:21:21 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:21:21 AM	Tube furnace set to 150
9/28/2011	8:21:51 AM	Helium valve closed
9/28/2011	8:21:51 AM	H2 valve closed
9/28/2011	8:21:51 AM	BCl3 valve closed
9/28/2011	8:21:51 AM	PH3 valve closed
9/28/2011	8:21:51 AM	SiCl4 pre valve closed
9/28/2011	8:21:51 AM	SiCl4 post valve closed
9/28/2011	8:21:51 AM	Bypass valve closed
9/28/2011	8:21:51 AM	Bubbler valve closed
9/28/2011	8:21:51 AM	Main Vac valve opened
9/28/2011	8:21:51 AM	Helium MFC set to  0.000000
9/28/2011	8:21:51 AM	H2 MFC set to  0.000000
9/28/2011	8:21:51 AM	BCl3 MFC set to  0.000000
9/28/2011	8:21:51 AM	PHl3 MFC set to  0.000000
9/28/2011	8:21:51 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:21:51 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:21:51 AM	Tube furnace set to 150
9/28/2011	8:22:21 AM	H2 valve closed
9/28/2011	8:22:21 AM	BCl3 valve closed
9/28/2011	8:22:21 AM	PH3 valve closed
9/28/2011	8:22:21 AM	SiCl4 pre valve closed
9/28/2011	8:22:21 AM	SiCl4 post valve closed
9/28/2011	8:22:21 AM	Bypass valve closed
9/28/2011	8:22:21 AM	Bubbler valve closed
9/28/2011	8:22:21 AM	Helium valve opened
9/28/2011	8:22:21 AM	Main Vac valve opened
9/28/2011	8:22:21 AM	Helium MFC set to  20.000000
9/28/2011	8:22:21 AM	H2 MFC set to  0.000000
9/28/2011	8:22:21 AM	BCl3 MFC set to  0.000000
9/28/2011	8:22:21 AM	PHl3 MFC set to  0.000000
9/28/2011	8:22:21 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:22:21 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:22:22 AM	Tube furnace set to 150
9/28/2011	8:22:52 AM	Helium valve closed
9/28/2011	8:22:52 AM	H2 valve closed
9/28/2011	8:22:52 AM	BCl3 valve closed
9/28/2011	8:22:52 AM	PH3 valve closed
9/28/2011	8:22:52 AM	SiCl4 pre valve closed
9/28/2011	8:22:52 AM	SiCl4 post valve closed
9/28/2011	8:22:52 AM	Bypass valve closed
9/28/2011	8:22:52 AM	Bubbler valve closed
9/28/2011	8:22:52 AM	Main Vac valve opened
9/28/2011	8:22:52 AM	Helium MFC set to  0.000000
9/28/2011	8:22:52 AM	H2 MFC set to  0.000000
9/28/2011	8:22:52 AM	BCl3 MFC set to  0.000000
9/28/2011	8:22:52 AM	PHl3 MFC set to  0.000000
9/28/2011	8:22:52 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:22:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:22:52 AM	Tube furnace set to 150
9/28/2011	8:22:53 AM	Run finished at 8:22 AM
9/28/2011	8:42:38 AM	Tube furnace set to 0
9/28/2011	8:43:22 AM	Main Vac valve closed
9/28/2011	8:43:37 AM	Main Vac valve opened
9/28/2011	8:44:46 AM	Main Vac valve closed
9/28/2011	8:45:02 AM	Main Vac valve opened
9/28/2011	8:47:06 AM	Recipe started at 8:47 AM
9/28/2011	8:47:06 AM	Helium valve closed
9/28/2011	8:47:06 AM	H2 valve closed
9/28/2011	8:47:06 AM	BCl3 valve closed
9/28/2011	8:47:06 AM	PH3 valve closed
9/28/2011	8:47:06 AM	SiCl4 pre valve closed
9/28/2011	8:47:06 AM	SiCl4 post valve closed
9/28/2011	8:47:06 AM	Main Vac valve closed
9/28/2011	8:47:06 AM	Bypass valve closed
9/28/2011	8:47:06 AM	Bubbler valve closed
9/28/2011	8:47:06 AM	Helium MFC set to  0.000000
9/28/2011	8:47:06 AM	H2 MFC set to  0.000000
9/28/2011	8:47:06 AM	BCl3 MFC set to  0.000000
9/28/2011	8:47:06 AM	PHl3 MFC set to  0.000000
9/28/2011	8:47:06 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:47:06 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:47:07 AM	Tube furnace set to 0
9/28/2011	8:47:10 AM	Helium valve closed
9/28/2011	8:47:10 AM	BCl3 valve closed
9/28/2011	8:47:10 AM	PH3 valve closed
9/28/2011	8:47:10 AM	SiCl4 pre valve closed
9/28/2011	8:47:10 AM	SiCl4 post valve closed
9/28/2011	8:47:10 AM	Main Vac valve closed
9/28/2011	8:47:10 AM	Bypass valve closed
9/28/2011	8:47:10 AM	Bubbler valve closed
9/28/2011	8:47:10 AM	H2 valve opened
9/28/2011	8:47:10 AM	Helium MFC set to  0.000000
9/28/2011	8:47:10 AM	H2 MFC set to  500.000000
9/28/2011	8:47:10 AM	BCl3 MFC set to  0.000000
9/28/2011	8:47:10 AM	PHl3 MFC set to  0.000000
9/28/2011	8:47:10 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:47:10 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:47:10 AM	Tube furnace set to 0
9/28/2011	8:48:13 AM	Helium valve closed
9/28/2011	8:48:13 AM	BCl3 valve closed
9/28/2011	8:48:13 AM	PH3 valve closed
9/28/2011	8:48:13 AM	SiCl4 pre valve closed
9/28/2011	8:48:13 AM	SiCl4 post valve closed
9/28/2011	8:48:13 AM	Main Vac valve closed
9/28/2011	8:48:13 AM	Bypass valve closed
9/28/2011	8:48:13 AM	H2 valve opened
9/28/2011	8:48:13 AM	Bubbler valve opened
9/28/2011	8:48:13 AM	Helium MFC set to  0.000000
9/28/2011	8:48:13 AM	H2 MFC set to  500.000000
9/28/2011	8:48:13 AM	BCl3 MFC set to  0.000000
9/28/2011	8:48:13 AM	PHl3 MFC set to  0.000000
9/28/2011	8:48:13 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:48:13 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:48:14 AM	Tube furnace set to 0
9/28/2011	8:48:15 AM	Helium valve closed
9/28/2011	8:48:15 AM	BCl3 valve closed
9/28/2011	8:48:15 AM	PH3 valve closed
9/28/2011	8:48:15 AM	SiCl4 pre valve closed
9/28/2011	8:48:15 AM	SiCl4 post valve closed
9/28/2011	8:48:15 AM	Main Vac valve closed
9/28/2011	8:48:15 AM	Bypass valve closed
9/28/2011	8:48:15 AM	H2 valve opened
9/28/2011	8:48:15 AM	Bubbler valve opened
9/28/2011	8:48:15 AM	Helium MFC set to  0.000000
9/28/2011	8:48:15 AM	H2 MFC set to  500.000000
9/28/2011	8:48:15 AM	BCl3 MFC set to  0.000000
9/28/2011	8:48:15 AM	PHl3 MFC set to  0.000000
9/28/2011	8:48:15 AM	SiCl4 MFC set to  0.000000
9/28/2011	8:48:15 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:48:15 AM	Tube furnace set to 1000
9/28/2011	9:08:15 AM	Helium valve closed
9/28/2011	9:08:15 AM	PH3 valve closed
9/28/2011	9:08:15 AM	Main Vac valve closed
9/28/2011	9:08:15 AM	Bypass valve closed
9/28/2011	9:08:15 AM	H2 valve opened
9/28/2011	9:08:15 AM	BCl3 valve opened
9/28/2011	9:08:15 AM	SiCl4 pre valve opened
9/28/2011	9:08:15 AM	SiCl4 post valve opened
9/28/2011	9:08:15 AM	Bubbler valve opened
9/28/2011	9:08:15 AM	Helium MFC set to  0.000000
9/28/2011	9:08:15 AM	H2 MFC set to  500.000000
9/28/2011	9:08:15 AM	BCl3 MFC set to  2.500000
9/28/2011	9:08:15 AM	PHl3 MFC set to  0.000000
9/28/2011	9:08:15 AM	SiCl4 MFC set to  50.000000
9/28/2011	9:08:15 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:08:15 AM	Tube furnace set to 1000
9/28/2011	9:13:15 AM	Helium valve closed
9/28/2011	9:13:15 AM	BCl3 valve closed
9/28/2011	9:13:15 AM	PH3 valve closed
9/28/2011	9:13:15 AM	SiCl4 pre valve closed
9/28/2011	9:13:15 AM	SiCl4 post valve closed
9/28/2011	9:13:15 AM	Main Vac valve closed
9/28/2011	9:13:15 AM	Bypass valve closed
9/28/2011	9:13:15 AM	H2 valve opened
9/28/2011	9:13:15 AM	Bubbler valve opened
9/28/2011	9:13:15 AM	Helium MFC set to  0.000000
9/28/2011	9:13:15 AM	H2 MFC set to  500.000000
9/28/2011	9:13:15 AM	BCl3 MFC set to  0.000000
9/28/2011	9:13:15 AM	PHl3 MFC set to  0.000000
9/28/2011	9:13:15 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:13:15 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:13:15 AM	Tube furnace set to 750
9/28/2011	9:18:15 AM	H2 valve closed
9/28/2011	9:18:15 AM	BCl3 valve closed
9/28/2011	9:18:15 AM	PH3 valve closed
9/28/2011	9:18:15 AM	SiCl4 pre valve closed
9/28/2011	9:18:15 AM	SiCl4 post valve closed
9/28/2011	9:18:15 AM	Main Vac valve closed
9/28/2011	9:18:15 AM	Bypass valve closed
9/28/2011	9:18:15 AM	Helium valve opened
9/28/2011	9:18:15 AM	Bubbler valve opened
9/28/2011	9:18:15 AM	Helium MFC set to  500.000000
9/28/2011	9:18:15 AM	H2 MFC set to  0.000000
9/28/2011	9:18:15 AM	BCl3 MFC set to  0.000000
9/28/2011	9:18:15 AM	PHl3 MFC set to  0.000000
9/28/2011	9:18:15 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:18:15 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:18:15 AM	Tube furnace set to 0
9/28/2011	9:38:15 AM	Helium valve closed
9/28/2011	9:38:15 AM	H2 valve closed
9/28/2011	9:38:15 AM	BCl3 valve closed
9/28/2011	9:38:15 AM	PH3 valve closed
9/28/2011	9:38:15 AM	SiCl4 pre valve closed
9/28/2011	9:38:15 AM	SiCl4 post valve closed
9/28/2011	9:38:15 AM	Main Vac valve closed
9/28/2011	9:38:15 AM	Bypass valve closed
9/28/2011	9:38:15 AM	Bubbler valve closed
9/28/2011	9:38:15 AM	Helium MFC set to  0.000000
9/28/2011	9:38:15 AM	H2 MFC set to  0.000000
9/28/2011	9:38:15 AM	BCl3 MFC set to  0.000000
9/28/2011	9:38:15 AM	PHl3 MFC set to  0.000000
9/28/2011	9:38:15 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:38:15 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:38:16 AM	Tube furnace set to 0
9/28/2011	9:38:17 AM	Run finished at 9:38 AM
9/28/2011	9:40:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2011	9:40:56 AM	Recipe started at 9:40 AM
9/28/2011	9:40:56 AM	Helium valve closed
9/28/2011	9:40:56 AM	H2 valve closed
9/28/2011	9:40:56 AM	BCl3 valve closed
9/28/2011	9:40:56 AM	PH3 valve closed
9/28/2011	9:40:56 AM	SiCl4 pre valve closed
9/28/2011	9:40:56 AM	SiCl4 post valve closed
9/28/2011	9:40:56 AM	Main Vac valve closed
9/28/2011	9:40:56 AM	Bubbler valve closed
9/28/2011	9:40:56 AM	Bypass valve opened
9/28/2011	9:40:56 AM	Helium MFC set to  0.000000
9/28/2011	9:40:56 AM	H2 MFC set to  0.000000
9/28/2011	9:40:56 AM	BCl3 MFC set to  0.000000
9/28/2011	9:40:56 AM	PHl3 MFC set to  0.000000
9/28/2011	9:40:56 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:40:56 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:40:56 AM	Tube furnace set to 0
9/28/2011	9:41:49 AM	Helium valve closed
9/28/2011	9:41:49 AM	H2 valve closed
9/28/2011	9:41:49 AM	BCl3 valve closed
9/28/2011	9:41:49 AM	PH3 valve closed
9/28/2011	9:41:49 AM	SiCl4 pre valve closed
9/28/2011	9:41:49 AM	SiCl4 post valve closed
9/28/2011	9:41:49 AM	Main Vac valve closed
9/28/2011	9:41:49 AM	Bubbler valve closed
9/28/2011	9:41:49 AM	Bypass valve opened
9/28/2011	9:41:49 AM	Helium MFC set to  0.000000
9/28/2011	9:41:49 AM	H2 MFC set to  0.000000
9/28/2011	9:41:49 AM	BCl3 MFC set to  0.000000
9/28/2011	9:41:49 AM	PHl3 MFC set to  0.000000
9/28/2011	9:41:49 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:41:49 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:41:49 AM	Tube furnace set to 0
9/28/2011	9:42:11 AM	Helium valve closed
9/28/2011	9:42:11 AM	H2 valve closed
9/28/2011	9:42:11 AM	BCl3 valve closed
9/28/2011	9:42:11 AM	PH3 valve closed
9/28/2011	9:42:11 AM	SiCl4 pre valve closed
9/28/2011	9:42:11 AM	SiCl4 post valve closed
9/28/2011	9:42:11 AM	Bypass valve closed
9/28/2011	9:42:11 AM	Bubbler valve closed
9/28/2011	9:42:11 AM	Main Vac valve opened
9/28/2011	9:42:11 AM	Helium MFC set to  0.000000
9/28/2011	9:42:11 AM	H2 MFC set to  0.000000
9/28/2011	9:42:11 AM	BCl3 MFC set to  0.000000
9/28/2011	9:42:11 AM	PHl3 MFC set to  0.000000
9/28/2011	9:42:11 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:42:11 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:42:11 AM	Tube furnace set to 0
9/28/2011	9:42:12 AM	Run finished at 9:42 AM
9/28/2011	9:42:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2011	9:42:32 AM	Recipe started at 9:42 AM
9/28/2011	9:42:32 AM	Helium valve closed
9/28/2011	9:42:32 AM	H2 valve closed
9/28/2011	9:42:32 AM	BCl3 valve closed
9/28/2011	9:42:32 AM	PH3 valve closed
9/28/2011	9:42:32 AM	SiCl4 pre valve closed
9/28/2011	9:42:32 AM	SiCl4 post valve closed
9/28/2011	9:42:32 AM	Main Vac valve closed
9/28/2011	9:42:32 AM	Bypass valve closed
9/28/2011	9:42:32 AM	Bubbler valve closed
9/28/2011	9:42:32 AM	Helium MFC set to  0.000000
9/28/2011	9:42:32 AM	H2 MFC set to  0.000000
9/28/2011	9:42:32 AM	BCl3 MFC set to  0.000000
9/28/2011	9:42:32 AM	PHl3 MFC set to  0.000000
9/28/2011	9:42:32 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:42:32 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:42:32 AM	Tube furnace set to 0
9/28/2011	9:42:35 AM	Helium valve closed
9/28/2011	9:42:35 AM	BCl3 valve closed
9/28/2011	9:42:35 AM	PH3 valve closed
9/28/2011	9:42:35 AM	SiCl4 pre valve closed
9/28/2011	9:42:35 AM	SiCl4 post valve closed
9/28/2011	9:42:35 AM	Main Vac valve closed
9/28/2011	9:42:35 AM	Bypass valve closed
9/28/2011	9:42:35 AM	Bubbler valve closed
9/28/2011	9:42:35 AM	H2 valve opened
9/28/2011	9:42:35 AM	Helium MFC set to  0.000000
9/28/2011	9:42:35 AM	H2 MFC set to  500.000000
9/28/2011	9:42:35 AM	BCl3 MFC set to  0.000000
9/28/2011	9:42:35 AM	PHl3 MFC set to  0.000000
9/28/2011	9:42:35 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:42:35 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:42:36 AM	Tube furnace set to 0
9/28/2011	9:43:41 AM	Helium valve closed
9/28/2011	9:43:41 AM	BCl3 valve closed
9/28/2011	9:43:41 AM	PH3 valve closed
9/28/2011	9:43:41 AM	SiCl4 pre valve closed
9/28/2011	9:43:41 AM	SiCl4 post valve closed
9/28/2011	9:43:41 AM	Main Vac valve closed
9/28/2011	9:43:41 AM	Bypass valve closed
9/28/2011	9:43:41 AM	H2 valve opened
9/28/2011	9:43:41 AM	Bubbler valve opened
9/28/2011	9:43:41 AM	Helium MFC set to  0.000000
9/28/2011	9:43:41 AM	H2 MFC set to  500.000000
9/28/2011	9:43:41 AM	BCl3 MFC set to  0.000000
9/28/2011	9:43:41 AM	PHl3 MFC set to  0.000000
9/28/2011	9:43:41 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:43:41 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:43:41 AM	Tube furnace set to 0
9/28/2011	9:43:42 AM	Helium valve closed
9/28/2011	9:43:42 AM	BCl3 valve closed
9/28/2011	9:43:42 AM	PH3 valve closed
9/28/2011	9:43:42 AM	SiCl4 pre valve closed
9/28/2011	9:43:42 AM	SiCl4 post valve closed
9/28/2011	9:43:42 AM	Main Vac valve closed
9/28/2011	9:43:42 AM	Bypass valve closed
9/28/2011	9:43:42 AM	H2 valve opened
9/28/2011	9:43:42 AM	Bubbler valve opened
9/28/2011	9:43:42 AM	Helium MFC set to  0.000000
9/28/2011	9:43:42 AM	H2 MFC set to  500.000000
9/28/2011	9:43:42 AM	BCl3 MFC set to  0.000000
9/28/2011	9:43:42 AM	PHl3 MFC set to  0.000000
9/28/2011	9:43:42 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:43:42 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:43:42 AM	Tube furnace set to 1000
9/28/2011	9:44:01 AM	Run aborted at 9:44 AM
9/28/2011	9:44:01 AM	Helium valve closed
9/28/2011	9:44:01 AM	H2 valve closed
9/28/2011	9:44:01 AM	BCl3 valve closed
9/28/2011	9:44:01 AM	PH3 valve closed
9/28/2011	9:44:01 AM	SiCl4 pre valve closed
9/28/2011	9:44:01 AM	SiCl4 post valve closed
9/28/2011	9:44:01 AM	Bypass valve closed
9/28/2011	9:44:01 AM	Main Vac valve closed
9/28/2011	9:44:01 AM	Bubbler valve closed
9/28/2011	9:44:01 AM	Helium MFC set to  0.000000
9/28/2011	9:44:01 AM	H2 MFC set to  0.000000
9/28/2011	9:44:01 AM	BCl3 MFC set to  0.000000
9/28/2011	9:44:01 AM	PHl3 MFC set to  0.000000
9/28/2011	9:44:01 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:44:01 AM	Tube furnace set to 0
9/28/2011	9:48:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2011	9:48:38 AM	Recipe started at 9:48 AM
9/28/2011	9:48:38 AM	Helium valve closed
9/28/2011	9:48:38 AM	H2 valve closed
9/28/2011	9:48:38 AM	BCl3 valve closed
9/28/2011	9:48:38 AM	PH3 valve closed
9/28/2011	9:48:38 AM	SiCl4 pre valve closed
9/28/2011	9:48:38 AM	SiCl4 post valve closed
9/28/2011	9:48:38 AM	Main Vac valve closed
9/28/2011	9:48:38 AM	Bypass valve closed
9/28/2011	9:48:38 AM	Bubbler valve closed
9/28/2011	9:48:38 AM	Helium MFC set to  0.000000
9/28/2011	9:48:38 AM	H2 MFC set to  0.000000
9/28/2011	9:48:38 AM	BCl3 MFC set to  0.000000
9/28/2011	9:48:38 AM	PHl3 MFC set to  0.000000
9/28/2011	9:48:38 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:48:38 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:48:38 AM	Tube furnace set to 0
9/28/2011	9:48:42 AM	H2 valve closed
9/28/2011	9:48:42 AM	BCl3 valve closed
9/28/2011	9:48:42 AM	PH3 valve closed
9/28/2011	9:48:42 AM	SiCl4 pre valve closed
9/28/2011	9:48:42 AM	SiCl4 post valve closed
9/28/2011	9:48:42 AM	Main Vac valve closed
9/28/2011	9:48:42 AM	Bypass valve closed
9/28/2011	9:48:42 AM	Bubbler valve closed
9/28/2011	9:48:42 AM	Helium valve opened
9/28/2011	9:48:42 AM	Helium MFC set to  500.000000
9/28/2011	9:48:42 AM	H2 MFC set to  0.000000
9/28/2011	9:48:42 AM	BCl3 MFC set to  0.000000
9/28/2011	9:48:42 AM	PHl3 MFC set to  0.000000
9/28/2011	9:48:42 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:48:42 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:48:42 AM	Tube furnace set to 0
9/28/2011	9:48:42 AM	Helium valve closed
9/28/2011	9:48:42 AM	H2 valve closed
9/28/2011	9:48:42 AM	BCl3 valve closed
9/28/2011	9:48:42 AM	PH3 valve closed
9/28/2011	9:48:42 AM	SiCl4 pre valve closed
9/28/2011	9:48:42 AM	SiCl4 post valve closed
9/28/2011	9:48:42 AM	Main Vac valve closed
9/28/2011	9:48:42 AM	Bypass valve closed
9/28/2011	9:48:42 AM	Bubbler valve closed
9/28/2011	9:48:42 AM	Helium MFC set to  0.000000
9/28/2011	9:48:42 AM	H2 MFC set to  0.000000
9/28/2011	9:48:42 AM	BCl3 MFC set to  0.000000
9/28/2011	9:48:42 AM	PHl3 MFC set to  0.000000
9/28/2011	9:48:42 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:48:42 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:48:42 AM	Tube furnace set to 0
9/28/2011	9:48:43 AM	Run finished at 9:48 AM
9/28/2011	9:48:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2011	9:51:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2011	9:51:29 AM	Recipe started at 9:51 AM
9/28/2011	9:51:29 AM	Helium valve closed
9/28/2011	9:51:29 AM	H2 valve closed
9/28/2011	9:51:30 AM	BCl3 valve closed
9/28/2011	9:51:30 AM	PH3 valve closed
9/28/2011	9:51:30 AM	SiCl4 pre valve closed
9/28/2011	9:51:30 AM	SiCl4 post valve closed
9/28/2011	9:51:30 AM	Main Vac valve closed
9/28/2011	9:51:30 AM	Bubbler valve closed
9/28/2011	9:51:30 AM	Bypass valve opened
9/28/2011	9:51:30 AM	Helium MFC set to  0.000000
9/28/2011	9:51:30 AM	H2 MFC set to  0.000000
9/28/2011	9:51:30 AM	BCl3 MFC set to  0.000000
9/28/2011	9:51:30 AM	PHl3 MFC set to  0.000000
9/28/2011	9:51:30 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:51:30 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:51:30 AM	Tube furnace set to 0
9/28/2011	9:52:19 AM	Helium valve closed
9/28/2011	9:52:19 AM	H2 valve closed
9/28/2011	9:52:19 AM	BCl3 valve closed
9/28/2011	9:52:19 AM	PH3 valve closed
9/28/2011	9:52:19 AM	SiCl4 pre valve closed
9/28/2011	9:52:19 AM	SiCl4 post valve closed
9/28/2011	9:52:19 AM	Main Vac valve closed
9/28/2011	9:52:19 AM	Bubbler valve closed
9/28/2011	9:52:19 AM	Bypass valve opened
9/28/2011	9:52:19 AM	Helium MFC set to  0.000000
9/28/2011	9:52:19 AM	H2 MFC set to  0.000000
9/28/2011	9:52:19 AM	BCl3 MFC set to  0.000000
9/28/2011	9:52:19 AM	PHl3 MFC set to  0.000000
9/28/2011	9:52:19 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:52:19 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:52:20 AM	Tube furnace set to 0
9/28/2011	9:52:31 AM	Helium valve closed
9/28/2011	9:52:31 AM	H2 valve closed
9/28/2011	9:52:31 AM	BCl3 valve closed
9/28/2011	9:52:31 AM	PH3 valve closed
9/28/2011	9:52:31 AM	SiCl4 pre valve closed
9/28/2011	9:52:31 AM	SiCl4 post valve closed
9/28/2011	9:52:31 AM	Bypass valve closed
9/28/2011	9:52:31 AM	Bubbler valve closed
9/28/2011	9:52:31 AM	Main Vac valve opened
9/28/2011	9:52:31 AM	Helium MFC set to  0.000000
9/28/2011	9:52:31 AM	H2 MFC set to  0.000000
9/28/2011	9:52:31 AM	BCl3 MFC set to  0.000000
9/28/2011	9:52:31 AM	PHl3 MFC set to  0.000000
9/28/2011	9:52:31 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:52:31 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:52:32 AM	Tube furnace set to 0
9/28/2011	9:52:33 AM	Run finished at 9:52 AM
9/28/2011	9:52:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2011	9:53:15 AM	Recipe started at 9:53 AM
9/28/2011	9:53:15 AM	Helium valve closed
9/28/2011	9:53:15 AM	H2 valve closed
9/28/2011	9:53:15 AM	BCl3 valve closed
9/28/2011	9:53:15 AM	PH3 valve closed
9/28/2011	9:53:15 AM	SiCl4 pre valve closed
9/28/2011	9:53:15 AM	SiCl4 post valve closed
9/28/2011	9:53:15 AM	Bypass valve closed
9/28/2011	9:53:15 AM	Bubbler valve closed
9/28/2011	9:53:15 AM	Main Vac valve opened
9/28/2011	9:53:15 AM	Helium MFC set to  0.000000
9/28/2011	9:53:15 AM	H2 MFC set to  0.000000
9/28/2011	9:53:15 AM	BCl3 MFC set to  0.000000
9/28/2011	9:53:15 AM	PHl3 MFC set to  0.000000
9/28/2011	9:53:15 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:53:15 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:53:15 AM	Tube furnace set to 150
9/28/2011	9:53:45 AM	H2 valve closed
9/28/2011	9:53:45 AM	BCl3 valve closed
9/28/2011	9:53:45 AM	PH3 valve closed
9/28/2011	9:53:45 AM	SiCl4 pre valve closed
9/28/2011	9:53:45 AM	SiCl4 post valve closed
9/28/2011	9:53:45 AM	Bypass valve closed
9/28/2011	9:53:45 AM	Bubbler valve closed
9/28/2011	9:53:45 AM	Helium valve opened
9/28/2011	9:53:45 AM	Main Vac valve opened
9/28/2011	9:53:45 AM	Helium MFC set to  20.000000
9/28/2011	9:53:45 AM	H2 MFC set to  0.000000
9/28/2011	9:53:45 AM	BCl3 MFC set to  0.000000
9/28/2011	9:53:45 AM	PHl3 MFC set to  0.000000
9/28/2011	9:53:45 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:53:45 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:53:45 AM	Tube furnace set to 150
9/28/2011	9:54:15 AM	Helium valve closed
9/28/2011	9:54:15 AM	H2 valve closed
9/28/2011	9:54:15 AM	BCl3 valve closed
9/28/2011	9:54:15 AM	PH3 valve closed
9/28/2011	9:54:15 AM	SiCl4 pre valve closed
9/28/2011	9:54:15 AM	SiCl4 post valve closed
9/28/2011	9:54:15 AM	Bypass valve closed
9/28/2011	9:54:15 AM	Bubbler valve closed
9/28/2011	9:54:15 AM	Main Vac valve opened
9/28/2011	9:54:15 AM	Helium MFC set to  0.000000
9/28/2011	9:54:15 AM	H2 MFC set to  0.000000
9/28/2011	9:54:15 AM	BCl3 MFC set to  0.000000
9/28/2011	9:54:15 AM	PHl3 MFC set to  0.000000
9/28/2011	9:54:15 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:54:15 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:54:16 AM	Tube furnace set to 150
9/28/2011	9:54:46 AM	H2 valve closed
9/28/2011	9:54:46 AM	BCl3 valve closed
9/28/2011	9:54:46 AM	PH3 valve closed
9/28/2011	9:54:46 AM	SiCl4 pre valve closed
9/28/2011	9:54:46 AM	SiCl4 post valve closed
9/28/2011	9:54:46 AM	Bypass valve closed
9/28/2011	9:54:46 AM	Bubbler valve closed
9/28/2011	9:54:46 AM	Helium valve opened
9/28/2011	9:54:46 AM	Main Vac valve opened
9/28/2011	9:54:46 AM	Helium MFC set to  20.000000
9/28/2011	9:54:46 AM	H2 MFC set to  0.000000
9/28/2011	9:54:46 AM	BCl3 MFC set to  0.000000
9/28/2011	9:54:46 AM	PHl3 MFC set to  0.000000
9/28/2011	9:54:46 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:54:46 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:54:46 AM	Tube furnace set to 150
9/28/2011	9:55:16 AM	Helium valve closed
9/28/2011	9:55:16 AM	H2 valve closed
9/28/2011	9:55:16 AM	BCl3 valve closed
9/28/2011	9:55:16 AM	PH3 valve closed
9/28/2011	9:55:16 AM	SiCl4 pre valve closed
9/28/2011	9:55:16 AM	SiCl4 post valve closed
9/28/2011	9:55:16 AM	Bypass valve closed
9/28/2011	9:55:16 AM	Bubbler valve closed
9/28/2011	9:55:16 AM	Main Vac valve opened
9/28/2011	9:55:16 AM	Helium MFC set to  0.000000
9/28/2011	9:55:16 AM	H2 MFC set to  0.000000
9/28/2011	9:55:16 AM	BCl3 MFC set to  0.000000
9/28/2011	9:55:16 AM	PHl3 MFC set to  0.000000
9/28/2011	9:55:16 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:55:16 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:55:16 AM	Tube furnace set to 150
9/28/2011	9:55:46 AM	H2 valve closed
9/28/2011	9:55:46 AM	BCl3 valve closed
9/28/2011	9:55:46 AM	PH3 valve closed
9/28/2011	9:55:46 AM	SiCl4 pre valve closed
9/28/2011	9:55:46 AM	SiCl4 post valve closed
9/28/2011	9:55:46 AM	Bypass valve closed
9/28/2011	9:55:46 AM	Bubbler valve closed
9/28/2011	9:55:46 AM	Helium valve opened
9/28/2011	9:55:46 AM	Main Vac valve opened
9/28/2011	9:55:46 AM	Helium MFC set to  20.000000
9/28/2011	9:55:46 AM	H2 MFC set to  0.000000
9/28/2011	9:55:46 AM	BCl3 MFC set to  0.000000
9/28/2011	9:55:46 AM	PHl3 MFC set to  0.000000
9/28/2011	9:55:46 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:55:46 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:55:46 AM	Tube furnace set to 150
9/28/2011	9:56:16 AM	Helium valve closed
9/28/2011	9:56:16 AM	H2 valve closed
9/28/2011	9:56:16 AM	BCl3 valve closed
9/28/2011	9:56:16 AM	PH3 valve closed
9/28/2011	9:56:16 AM	SiCl4 pre valve closed
9/28/2011	9:56:16 AM	SiCl4 post valve closed
9/28/2011	9:56:16 AM	Bypass valve closed
9/28/2011	9:56:16 AM	Bubbler valve closed
9/28/2011	9:56:16 AM	Main Vac valve opened
9/28/2011	9:56:16 AM	Helium MFC set to  0.000000
9/28/2011	9:56:16 AM	H2 MFC set to  0.000000
9/28/2011	9:56:16 AM	BCl3 MFC set to  0.000000
9/28/2011	9:56:16 AM	PHl3 MFC set to  0.000000
9/28/2011	9:56:16 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:56:16 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:56:16 AM	Tube furnace set to 150
9/28/2011	9:56:46 AM	H2 valve closed
9/28/2011	9:56:46 AM	BCl3 valve closed
9/28/2011	9:56:46 AM	PH3 valve closed
9/28/2011	9:56:46 AM	SiCl4 pre valve closed
9/28/2011	9:56:46 AM	SiCl4 post valve closed
9/28/2011	9:56:46 AM	Bypass valve closed
9/28/2011	9:56:46 AM	Bubbler valve closed
9/28/2011	9:56:46 AM	Helium valve opened
9/28/2011	9:56:46 AM	Main Vac valve opened
9/28/2011	9:56:46 AM	Helium MFC set to  20.000000
9/28/2011	9:56:46 AM	H2 MFC set to  0.000000
9/28/2011	9:56:46 AM	BCl3 MFC set to  0.000000
9/28/2011	9:56:46 AM	PHl3 MFC set to  0.000000
9/28/2011	9:56:47 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:56:47 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:56:47 AM	Tube furnace set to 150
9/28/2011	9:57:17 AM	Helium valve closed
9/28/2011	9:57:17 AM	H2 valve closed
9/28/2011	9:57:17 AM	BCl3 valve closed
9/28/2011	9:57:17 AM	PH3 valve closed
9/28/2011	9:57:17 AM	SiCl4 pre valve closed
9/28/2011	9:57:17 AM	SiCl4 post valve closed
9/28/2011	9:57:17 AM	Bypass valve closed
9/28/2011	9:57:17 AM	Bubbler valve closed
9/28/2011	9:57:17 AM	Main Vac valve opened
9/28/2011	9:57:17 AM	Helium MFC set to  0.000000
9/28/2011	9:57:17 AM	H2 MFC set to  0.000000
9/28/2011	9:57:17 AM	BCl3 MFC set to  0.000000
9/28/2011	9:57:17 AM	PHl3 MFC set to  0.000000
9/28/2011	9:57:17 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:57:17 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:57:17 AM	Tube furnace set to 150
9/28/2011	9:57:47 AM	H2 valve closed
9/28/2011	9:57:47 AM	BCl3 valve closed
9/28/2011	9:57:47 AM	PH3 valve closed
9/28/2011	9:57:47 AM	SiCl4 pre valve closed
9/28/2011	9:57:47 AM	SiCl4 post valve closed
9/28/2011	9:57:47 AM	Bypass valve closed
9/28/2011	9:57:47 AM	Bubbler valve closed
9/28/2011	9:57:47 AM	Helium valve opened
9/28/2011	9:57:47 AM	Main Vac valve opened
9/28/2011	9:57:47 AM	Helium MFC set to  20.000000
9/28/2011	9:57:47 AM	H2 MFC set to  0.000000
9/28/2011	9:57:47 AM	BCl3 MFC set to  0.000000
9/28/2011	9:57:47 AM	PHl3 MFC set to  0.000000
9/28/2011	9:57:47 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:57:47 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:57:47 AM	Tube furnace set to 150
9/28/2011	9:58:17 AM	Helium valve closed
9/28/2011	9:58:17 AM	H2 valve closed
9/28/2011	9:58:17 AM	BCl3 valve closed
9/28/2011	9:58:17 AM	PH3 valve closed
9/28/2011	9:58:17 AM	SiCl4 pre valve closed
9/28/2011	9:58:17 AM	SiCl4 post valve closed
9/28/2011	9:58:17 AM	Bypass valve closed
9/28/2011	9:58:17 AM	Bubbler valve closed
9/28/2011	9:58:17 AM	Main Vac valve opened
9/28/2011	9:58:17 AM	Helium MFC set to  0.000000
9/28/2011	9:58:17 AM	H2 MFC set to  0.000000
9/28/2011	9:58:17 AM	BCl3 MFC set to  0.000000
9/28/2011	9:58:17 AM	PHl3 MFC set to  0.000000
9/28/2011	9:58:17 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:58:17 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:58:17 AM	Tube furnace set to 150
9/28/2011	9:58:47 AM	H2 valve closed
9/28/2011	9:58:47 AM	BCl3 valve closed
9/28/2011	9:58:47 AM	PH3 valve closed
9/28/2011	9:58:47 AM	SiCl4 pre valve closed
9/28/2011	9:58:47 AM	SiCl4 post valve closed
9/28/2011	9:58:47 AM	Bypass valve closed
9/28/2011	9:58:47 AM	Bubbler valve closed
9/28/2011	9:58:47 AM	Helium valve opened
9/28/2011	9:58:47 AM	Main Vac valve opened
9/28/2011	9:58:47 AM	Helium MFC set to  20.000000
9/28/2011	9:58:47 AM	H2 MFC set to  0.000000
9/28/2011	9:58:47 AM	BCl3 MFC set to  0.000000
9/28/2011	9:58:47 AM	PHl3 MFC set to  0.000000
9/28/2011	9:58:47 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:58:47 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:58:48 AM	Tube furnace set to 150
9/28/2011	9:59:18 AM	Helium valve closed
9/28/2011	9:59:18 AM	H2 valve closed
9/28/2011	9:59:18 AM	BCl3 valve closed
9/28/2011	9:59:18 AM	PH3 valve closed
9/28/2011	9:59:18 AM	SiCl4 pre valve closed
9/28/2011	9:59:18 AM	SiCl4 post valve closed
9/28/2011	9:59:18 AM	Bypass valve closed
9/28/2011	9:59:18 AM	Bubbler valve closed
9/28/2011	9:59:18 AM	Main Vac valve opened
9/28/2011	9:59:18 AM	Helium MFC set to  0.000000
9/28/2011	9:59:18 AM	H2 MFC set to  0.000000
9/28/2011	9:59:18 AM	BCl3 MFC set to  0.000000
9/28/2011	9:59:18 AM	PHl3 MFC set to  0.000000
9/28/2011	9:59:18 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:59:18 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:59:18 AM	Tube furnace set to 150
9/28/2011	9:59:48 AM	H2 valve closed
9/28/2011	9:59:48 AM	BCl3 valve closed
9/28/2011	9:59:48 AM	PH3 valve closed
9/28/2011	9:59:48 AM	SiCl4 pre valve closed
9/28/2011	9:59:48 AM	SiCl4 post valve closed
9/28/2011	9:59:48 AM	Bypass valve closed
9/28/2011	9:59:48 AM	Bubbler valve closed
9/28/2011	9:59:48 AM	Helium valve opened
9/28/2011	9:59:48 AM	Main Vac valve opened
9/28/2011	9:59:48 AM	Helium MFC set to  20.000000
9/28/2011	9:59:48 AM	H2 MFC set to  0.000000
9/28/2011	9:59:48 AM	BCl3 MFC set to  0.000000
9/28/2011	9:59:48 AM	PHl3 MFC set to  0.000000
9/28/2011	9:59:48 AM	SiCl4 MFC set to  0.000000
9/28/2011	9:59:48 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:59:48 AM	Tube furnace set to 150
9/28/2011	10:00:18 AM	Helium valve closed
9/28/2011	10:00:18 AM	H2 valve closed
9/28/2011	10:00:18 AM	BCl3 valve closed
9/28/2011	10:00:18 AM	PH3 valve closed
9/28/2011	10:00:18 AM	SiCl4 pre valve closed
9/28/2011	10:00:18 AM	SiCl4 post valve closed
9/28/2011	10:00:18 AM	Bypass valve closed
9/28/2011	10:00:18 AM	Bubbler valve closed
9/28/2011	10:00:18 AM	Main Vac valve opened
9/28/2011	10:00:18 AM	Helium MFC set to  0.000000
9/28/2011	10:00:18 AM	H2 MFC set to  0.000000
9/28/2011	10:00:18 AM	BCl3 MFC set to  0.000000
9/28/2011	10:00:18 AM	PHl3 MFC set to  0.000000
9/28/2011	10:00:18 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:00:18 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:00:18 AM	Tube furnace set to 150
9/28/2011	10:00:48 AM	H2 valve closed
9/28/2011	10:00:48 AM	BCl3 valve closed
9/28/2011	10:00:48 AM	PH3 valve closed
9/28/2011	10:00:48 AM	SiCl4 pre valve closed
9/28/2011	10:00:48 AM	SiCl4 post valve closed
9/28/2011	10:00:48 AM	Bypass valve closed
9/28/2011	10:00:48 AM	Bubbler valve closed
9/28/2011	10:00:48 AM	Helium valve opened
9/28/2011	10:00:48 AM	Main Vac valve opened
9/28/2011	10:00:48 AM	Helium MFC set to  20.000000
9/28/2011	10:00:48 AM	H2 MFC set to  0.000000
9/28/2011	10:00:48 AM	BCl3 MFC set to  0.000000
9/28/2011	10:00:48 AM	PHl3 MFC set to  0.000000
9/28/2011	10:00:48 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:00:48 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:00:48 AM	Tube furnace set to 150
9/28/2011	10:01:18 AM	Helium valve closed
9/28/2011	10:01:18 AM	H2 valve closed
9/28/2011	10:01:18 AM	BCl3 valve closed
9/28/2011	10:01:18 AM	PH3 valve closed
9/28/2011	10:01:18 AM	SiCl4 pre valve closed
9/28/2011	10:01:18 AM	SiCl4 post valve closed
9/28/2011	10:01:18 AM	Bypass valve closed
9/28/2011	10:01:18 AM	Bubbler valve closed
9/28/2011	10:01:18 AM	Main Vac valve opened
9/28/2011	10:01:18 AM	Helium MFC set to  0.000000
9/28/2011	10:01:18 AM	H2 MFC set to  0.000000
9/28/2011	10:01:18 AM	BCl3 MFC set to  0.000000
9/28/2011	10:01:18 AM	PHl3 MFC set to  0.000000
9/28/2011	10:01:18 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:01:18 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:01:19 AM	Tube furnace set to 150
9/28/2011	10:01:49 AM	H2 valve closed
9/28/2011	10:01:49 AM	BCl3 valve closed
9/28/2011	10:01:49 AM	PH3 valve closed
9/28/2011	10:01:49 AM	SiCl4 pre valve closed
9/28/2011	10:01:49 AM	SiCl4 post valve closed
9/28/2011	10:01:49 AM	Bypass valve closed
9/28/2011	10:01:49 AM	Bubbler valve closed
9/28/2011	10:01:49 AM	Helium valve opened
9/28/2011	10:01:49 AM	Main Vac valve opened
9/28/2011	10:01:49 AM	Helium MFC set to  20.000000
9/28/2011	10:01:49 AM	H2 MFC set to  0.000000
9/28/2011	10:01:49 AM	BCl3 MFC set to  0.000000
9/28/2011	10:01:49 AM	PHl3 MFC set to  0.000000
9/28/2011	10:01:49 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:01:49 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:01:49 AM	Tube furnace set to 150
9/28/2011	10:02:19 AM	Helium valve closed
9/28/2011	10:02:19 AM	H2 valve closed
9/28/2011	10:02:19 AM	BCl3 valve closed
9/28/2011	10:02:19 AM	PH3 valve closed
9/28/2011	10:02:19 AM	SiCl4 pre valve closed
9/28/2011	10:02:19 AM	SiCl4 post valve closed
9/28/2011	10:02:19 AM	Bypass valve closed
9/28/2011	10:02:19 AM	Bubbler valve closed
9/28/2011	10:02:19 AM	Main Vac valve opened
9/28/2011	10:02:19 AM	Helium MFC set to  0.000000
9/28/2011	10:02:19 AM	H2 MFC set to  0.000000
9/28/2011	10:02:19 AM	BCl3 MFC set to  0.000000
9/28/2011	10:02:19 AM	PHl3 MFC set to  0.000000
9/28/2011	10:02:19 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:02:19 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:02:19 AM	Tube furnace set to 150
9/28/2011	10:02:49 AM	H2 valve closed
9/28/2011	10:02:49 AM	BCl3 valve closed
9/28/2011	10:02:49 AM	PH3 valve closed
9/28/2011	10:02:49 AM	SiCl4 pre valve closed
9/28/2011	10:02:49 AM	SiCl4 post valve closed
9/28/2011	10:02:49 AM	Bypass valve closed
9/28/2011	10:02:49 AM	Bubbler valve closed
9/28/2011	10:02:49 AM	Helium valve opened
9/28/2011	10:02:49 AM	Main Vac valve opened
9/28/2011	10:02:49 AM	Helium MFC set to  20.000000
9/28/2011	10:02:49 AM	H2 MFC set to  0.000000
9/28/2011	10:02:49 AM	BCl3 MFC set to  0.000000
9/28/2011	10:02:49 AM	PHl3 MFC set to  0.000000
9/28/2011	10:02:49 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:02:49 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:02:49 AM	Tube furnace set to 150
9/28/2011	10:03:19 AM	Helium valve closed
9/28/2011	10:03:19 AM	H2 valve closed
9/28/2011	10:03:19 AM	BCl3 valve closed
9/28/2011	10:03:19 AM	PH3 valve closed
9/28/2011	10:03:19 AM	SiCl4 pre valve closed
9/28/2011	10:03:19 AM	SiCl4 post valve closed
9/28/2011	10:03:19 AM	Bypass valve closed
9/28/2011	10:03:19 AM	Bubbler valve closed
9/28/2011	10:03:19 AM	Main Vac valve opened
9/28/2011	10:03:19 AM	Helium MFC set to  0.000000
9/28/2011	10:03:19 AM	H2 MFC set to  0.000000
9/28/2011	10:03:19 AM	BCl3 MFC set to  0.000000
9/28/2011	10:03:19 AM	PHl3 MFC set to  0.000000
9/28/2011	10:03:19 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:03:19 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:03:19 AM	Tube furnace set to 150
9/28/2011	10:03:20 AM	Run finished at 10:03 AM
9/28/2011	10:04:43 AM	Main Vac valve closed
9/28/2011	10:05:00 AM	Main Vac valve opened
9/28/2011	10:06:35 AM	Recipe started at 10:06 AM
9/28/2011	10:06:35 AM	Helium valve closed
9/28/2011	10:06:35 AM	H2 valve closed
9/28/2011	10:06:35 AM	BCl3 valve closed
9/28/2011	10:06:35 AM	PH3 valve closed
9/28/2011	10:06:35 AM	SiCl4 pre valve closed
9/28/2011	10:06:35 AM	SiCl4 post valve closed
9/28/2011	10:06:35 AM	Main Vac valve closed
9/28/2011	10:06:35 AM	Bypass valve closed
9/28/2011	10:06:35 AM	Bubbler valve closed
9/28/2011	10:06:35 AM	Helium MFC set to  0.000000
9/28/2011	10:06:35 AM	H2 MFC set to  0.000000
9/28/2011	10:06:35 AM	BCl3 MFC set to  0.000000
9/28/2011	10:06:35 AM	PHl3 MFC set to  0.000000
9/28/2011	10:06:35 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:06:35 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:06:35 AM	Tube furnace set to 0
9/28/2011	10:06:38 AM	Helium valve closed
9/28/2011	10:06:38 AM	BCl3 valve closed
9/28/2011	10:06:38 AM	PH3 valve closed
9/28/2011	10:06:38 AM	SiCl4 pre valve closed
9/28/2011	10:06:38 AM	SiCl4 post valve closed
9/28/2011	10:06:38 AM	Main Vac valve closed
9/28/2011	10:06:38 AM	Bypass valve closed
9/28/2011	10:06:38 AM	Bubbler valve closed
9/28/2011	10:06:38 AM	H2 valve opened
9/28/2011	10:06:38 AM	Helium MFC set to  0.000000
9/28/2011	10:06:38 AM	H2 MFC set to  500.000000
9/28/2011	10:06:38 AM	BCl3 MFC set to  0.000000
9/28/2011	10:06:38 AM	PHl3 MFC set to  0.000000
9/28/2011	10:06:38 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:06:38 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:06:39 AM	Tube furnace set to 0
9/28/2011	10:07:43 AM	Helium valve closed
9/28/2011	10:07:43 AM	BCl3 valve closed
9/28/2011	10:07:43 AM	PH3 valve closed
9/28/2011	10:07:43 AM	SiCl4 pre valve closed
9/28/2011	10:07:43 AM	SiCl4 post valve closed
9/28/2011	10:07:43 AM	Main Vac valve closed
9/28/2011	10:07:43 AM	Bypass valve closed
9/28/2011	10:07:43 AM	H2 valve opened
9/28/2011	10:07:43 AM	Bubbler valve opened
9/28/2011	10:07:43 AM	Helium MFC set to  0.000000
9/28/2011	10:07:43 AM	H2 MFC set to  500.000000
9/28/2011	10:07:43 AM	BCl3 MFC set to  0.000000
9/28/2011	10:07:43 AM	PHl3 MFC set to  0.000000
9/28/2011	10:07:43 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:07:43 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:07:43 AM	Tube furnace set to 0
9/28/2011	10:07:44 AM	Helium valve closed
9/28/2011	10:07:44 AM	BCl3 valve closed
9/28/2011	10:07:44 AM	PH3 valve closed
9/28/2011	10:07:44 AM	SiCl4 pre valve closed
9/28/2011	10:07:44 AM	SiCl4 post valve closed
9/28/2011	10:07:44 AM	Main Vac valve closed
9/28/2011	10:07:44 AM	Bypass valve closed
9/28/2011	10:07:44 AM	H2 valve opened
9/28/2011	10:07:44 AM	Bubbler valve opened
9/28/2011	10:07:44 AM	Helium MFC set to  0.000000
9/28/2011	10:07:44 AM	H2 MFC set to  500.000000
9/28/2011	10:07:44 AM	BCl3 MFC set to  0.000000
9/28/2011	10:07:44 AM	PHl3 MFC set to  0.000000
9/28/2011	10:07:44 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:07:44 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:07:44 AM	Tube furnace set to 1000
9/28/2011	10:26:52 AM	Helium valve closed
9/28/2011	10:26:52 AM	PH3 valve closed
9/28/2011	10:26:52 AM	Main Vac valve closed
9/28/2011	10:26:52 AM	Bypass valve closed
9/28/2011	10:26:52 AM	H2 valve opened
9/28/2011	10:26:52 AM	BCl3 valve opened
9/28/2011	10:26:52 AM	SiCl4 pre valve opened
9/28/2011	10:26:52 AM	SiCl4 post valve opened
9/28/2011	10:26:52 AM	Bubbler valve opened
9/28/2011	10:26:52 AM	Helium MFC set to  0.000000
9/28/2011	10:26:52 AM	H2 MFC set to  500.000000
9/28/2011	10:26:52 AM	BCl3 MFC set to  2.500000
9/28/2011	10:26:52 AM	PHl3 MFC set to  0.000000
9/28/2011	10:26:52 AM	SiCl4 MFC set to  50.000000
9/28/2011	10:26:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:26:52 AM	Tube furnace set to 1000
9/28/2011	10:31:52 AM	Helium valve closed
9/28/2011	10:31:52 AM	BCl3 valve closed
9/28/2011	10:31:52 AM	PH3 valve closed
9/28/2011	10:31:52 AM	SiCl4 pre valve closed
9/28/2011	10:31:52 AM	SiCl4 post valve closed
9/28/2011	10:31:52 AM	Main Vac valve closed
9/28/2011	10:31:52 AM	Bypass valve closed
9/28/2011	10:31:52 AM	H2 valve opened
9/28/2011	10:31:52 AM	Bubbler valve opened
9/28/2011	10:31:52 AM	Helium MFC set to  0.000000
9/28/2011	10:31:52 AM	H2 MFC set to  500.000000
9/28/2011	10:31:52 AM	BCl3 MFC set to  0.000000
9/28/2011	10:31:52 AM	PHl3 MFC set to  0.000000
9/28/2011	10:31:52 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:31:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:31:52 AM	Tube furnace set to 750
9/28/2011	10:36:52 AM	H2 valve closed
9/28/2011	10:36:52 AM	BCl3 valve closed
9/28/2011	10:36:52 AM	PH3 valve closed
9/28/2011	10:36:52 AM	SiCl4 pre valve closed
9/28/2011	10:36:52 AM	SiCl4 post valve closed
9/28/2011	10:36:52 AM	Main Vac valve closed
9/28/2011	10:36:52 AM	Bypass valve closed
9/28/2011	10:36:52 AM	Helium valve opened
9/28/2011	10:36:52 AM	Bubbler valve opened
9/28/2011	10:36:52 AM	Helium MFC set to  500.000000
9/28/2011	10:36:52 AM	H2 MFC set to  0.000000
9/28/2011	10:36:52 AM	BCl3 MFC set to  0.000000
9/28/2011	10:36:52 AM	PHl3 MFC set to  0.000000
9/28/2011	10:36:52 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:36:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:36:52 AM	Tube furnace set to 0
9/28/2011	10:56:52 AM	Helium valve closed
9/28/2011	10:56:52 AM	H2 valve closed
9/28/2011	10:56:52 AM	BCl3 valve closed
9/28/2011	10:56:52 AM	PH3 valve closed
9/28/2011	10:56:52 AM	SiCl4 pre valve closed
9/28/2011	10:56:52 AM	SiCl4 post valve closed
9/28/2011	10:56:52 AM	Main Vac valve closed
9/28/2011	10:56:52 AM	Bypass valve closed
9/28/2011	10:56:52 AM	Bubbler valve closed
9/28/2011	10:56:52 AM	Helium MFC set to  0.000000
9/28/2011	10:56:52 AM	H2 MFC set to  0.000000
9/28/2011	10:56:52 AM	BCl3 MFC set to  0.000000
9/28/2011	10:56:52 AM	PHl3 MFC set to  0.000000
9/28/2011	10:56:52 AM	SiCl4 MFC set to  0.000000
9/28/2011	10:56:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	10:56:52 AM	Tube furnace set to 0
9/28/2011	10:56:53 AM	Run finished at 10:56 AM
9/28/2011	11:07:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2011	11:07:24 AM	Recipe started at 11:07 AM
9/28/2011	11:07:24 AM	Helium valve closed
9/28/2011	11:07:24 AM	H2 valve closed
9/28/2011	11:07:24 AM	BCl3 valve closed
9/28/2011	11:07:24 AM	PH3 valve closed
9/28/2011	11:07:24 AM	SiCl4 pre valve closed
9/28/2011	11:07:24 AM	SiCl4 post valve closed
9/28/2011	11:07:24 AM	Main Vac valve closed
9/28/2011	11:07:24 AM	Bubbler valve closed
9/28/2011	11:07:24 AM	Bypass valve opened
9/28/2011	11:07:24 AM	Helium MFC set to  0.000000
9/28/2011	11:07:24 AM	H2 MFC set to  0.000000
9/28/2011	11:07:24 AM	BCl3 MFC set to  0.000000
9/28/2011	11:07:24 AM	PHl3 MFC set to  0.000000
9/28/2011	11:07:24 AM	SiCl4 MFC set to  0.000000
9/28/2011	11:07:24 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	11:07:24 AM	Tube furnace set to 0
9/28/2011	11:08:29 AM	Helium valve closed
9/28/2011	11:08:29 AM	H2 valve closed
9/28/2011	11:08:29 AM	BCl3 valve closed
9/28/2011	11:08:29 AM	PH3 valve closed
9/28/2011	11:08:29 AM	SiCl4 pre valve closed
9/28/2011	11:08:29 AM	SiCl4 post valve closed
9/28/2011	11:08:29 AM	Main Vac valve closed
9/28/2011	11:08:29 AM	Bubbler valve closed
9/28/2011	11:08:29 AM	Bypass valve opened
9/28/2011	11:08:29 AM	Helium MFC set to  0.000000
9/28/2011	11:08:29 AM	H2 MFC set to  0.000000
9/28/2011	11:08:29 AM	BCl3 MFC set to  0.000000
9/28/2011	11:08:29 AM	PHl3 MFC set to  0.000000
9/28/2011	11:08:29 AM	SiCl4 MFC set to  0.000000
9/28/2011	11:08:29 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	11:08:29 AM	Tube furnace set to 0
9/28/2011	11:09:29 AM	Helium valve closed
9/28/2011	11:09:29 AM	H2 valve closed
9/28/2011	11:09:29 AM	BCl3 valve closed
9/28/2011	11:09:29 AM	PH3 valve closed
9/28/2011	11:09:29 AM	SiCl4 pre valve closed
9/28/2011	11:09:29 AM	SiCl4 post valve closed
9/28/2011	11:09:29 AM	Bypass valve closed
9/28/2011	11:09:29 AM	Bubbler valve closed
9/28/2011	11:09:29 AM	Main Vac valve opened
9/28/2011	11:09:29 AM	Helium MFC set to  0.000000
9/28/2011	11:09:29 AM	H2 MFC set to  0.000000
9/28/2011	11:09:29 AM	BCl3 MFC set to  0.000000
9/28/2011	11:09:29 AM	PHl3 MFC set to  0.000000
9/28/2011	11:09:29 AM	SiCl4 MFC set to  0.000000
9/28/2011	11:09:29 AM	Bypass solenoid MFC set to  0.000000
9/28/2011	11:09:29 AM	Tube furnace set to 0
9/28/2011	11:09:30 AM	Run finished at 11:09 AM
9/28/2011	11:09:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2011	12:52:40 PM	Program exited cleanly
9/28/2011	12:53:15 PM	Program started normally
9/28/2011	12:53:15 PM	Helium valve closed
9/28/2011	12:53:15 PM	H2 valve closed
9/28/2011	12:53:15 PM	BCl3 valve closed
9/28/2011	12:53:15 PM	PH3 valve closed
9/28/2011	12:53:15 PM	SiCl4 pre valve closed
9/28/2011	12:53:15 PM	SiCl4 post valve closed
9/28/2011	12:53:15 PM	Main Vac valve closed
9/28/2011	12:53:15 PM	Bypass valve closed
9/28/2011	12:53:15 PM	Bubbler valve closed
9/28/2011	12:53:15 PM	Helium MFC set to  0.000000
9/28/2011	12:53:15 PM	H2 MFC set to  0.000000
9/28/2011	12:53:15 PM	BCl3 MFC set to  0.000000
9/28/2011	12:53:15 PM	PHl3 MFC set to  0.000000
9/28/2011	12:53:15 PM	SiCl4 MFC set to  0.000000
9/28/2011	12:53:15 PM	Bypass solenoid MFC set to  760.000000
9/28/2011	12:53:15 PM	Tube furnace set to 0
9/28/2011	12:53:16 PM	Main Vac valve opened
9/28/2011	1:03:42 PM	Main Vac valve closed
9/28/2011	1:03:54 PM	Main Vac valve opened
9/28/2011	1:04:13 PM	Recipe started at 1:04 PM
9/28/2011	1:04:13 PM	Helium valve closed
9/28/2011	1:04:13 PM	H2 valve closed
9/28/2011	1:04:13 PM	BCl3 valve closed
9/28/2011	1:04:13 PM	PH3 valve closed
9/28/2011	1:04:13 PM	SiCl4 pre valve closed
9/28/2011	1:04:13 PM	SiCl4 post valve closed
9/28/2011	1:04:13 PM	Main Vac valve closed
9/28/2011	1:04:13 PM	Bypass valve closed
9/28/2011	1:04:13 PM	Bubbler valve closed
9/28/2011	1:04:13 PM	Helium MFC set to  0.000000
9/28/2011	1:04:13 PM	H2 MFC set to  0.000000
9/28/2011	1:04:13 PM	BCl3 MFC set to  0.000000
9/28/2011	1:04:13 PM	PHl3 MFC set to  0.000000
9/28/2011	1:04:13 PM	SiCl4 MFC set to  0.000000
9/28/2011	1:04:13 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	1:04:13 PM	Tube furnace set to 0
9/28/2011	1:04:16 PM	Helium valve closed
9/28/2011	1:04:16 PM	BCl3 valve closed
9/28/2011	1:04:16 PM	PH3 valve closed
9/28/2011	1:04:16 PM	SiCl4 pre valve closed
9/28/2011	1:04:16 PM	SiCl4 post valve closed
9/28/2011	1:04:16 PM	Main Vac valve closed
9/28/2011	1:04:16 PM	Bypass valve closed
9/28/2011	1:04:16 PM	Bubbler valve closed
9/28/2011	1:04:16 PM	H2 valve opened
9/28/2011	1:04:16 PM	Helium MFC set to  0.000000
9/28/2011	1:04:16 PM	H2 MFC set to  500.000000
9/28/2011	1:04:16 PM	BCl3 MFC set to  0.000000
9/28/2011	1:04:16 PM	PHl3 MFC set to  0.000000
9/28/2011	1:04:16 PM	SiCl4 MFC set to  0.000000
9/28/2011	1:04:16 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	1:04:16 PM	Tube furnace set to 0
9/28/2011	1:05:25 PM	Helium valve closed
9/28/2011	1:05:25 PM	BCl3 valve closed
9/28/2011	1:05:25 PM	PH3 valve closed
9/28/2011	1:05:25 PM	SiCl4 pre valve closed
9/28/2011	1:05:25 PM	SiCl4 post valve closed
9/28/2011	1:05:25 PM	Main Vac valve closed
9/28/2011	1:05:25 PM	Bypass valve closed
9/28/2011	1:05:25 PM	H2 valve opened
9/28/2011	1:05:25 PM	Bubbler valve opened
9/28/2011	1:05:25 PM	Helium MFC set to  0.000000
9/28/2011	1:05:25 PM	H2 MFC set to  500.000000
9/28/2011	1:05:25 PM	BCl3 MFC set to  0.000000
9/28/2011	1:05:25 PM	PHl3 MFC set to  0.000000
9/28/2011	1:05:25 PM	SiCl4 MFC set to  0.000000
9/28/2011	1:05:25 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	1:05:25 PM	Tube furnace set to 0
9/28/2011	1:05:26 PM	Helium valve closed
9/28/2011	1:05:26 PM	BCl3 valve closed
9/28/2011	1:05:26 PM	PH3 valve closed
9/28/2011	1:05:26 PM	SiCl4 pre valve closed
9/28/2011	1:05:26 PM	SiCl4 post valve closed
9/28/2011	1:05:26 PM	Main Vac valve closed
9/28/2011	1:05:26 PM	Bypass valve closed
9/28/2011	1:05:26 PM	H2 valve opened
9/28/2011	1:05:26 PM	Bubbler valve opened
9/28/2011	1:05:26 PM	Helium MFC set to  0.000000
9/28/2011	1:05:26 PM	H2 MFC set to  500.000000
9/28/2011	1:05:26 PM	BCl3 MFC set to  0.000000
9/28/2011	1:05:26 PM	PHl3 MFC set to  0.000000
9/28/2011	1:05:26 PM	SiCl4 MFC set to  0.000000
9/28/2011	1:05:26 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	1:05:26 PM	Tube furnace set to 1000
9/28/2011	1:25:26 PM	Helium valve closed
9/28/2011	1:25:26 PM	BCl3 valve closed
9/28/2011	1:25:26 PM	PH3 valve closed
9/28/2011	1:25:26 PM	Main Vac valve closed
9/28/2011	1:25:26 PM	Bypass valve closed
9/28/2011	1:25:26 PM	H2 valve opened
9/28/2011	1:25:26 PM	SiCl4 pre valve opened
9/28/2011	1:25:26 PM	SiCl4 post valve opened
9/28/2011	1:25:26 PM	Bubbler valve opened
9/28/2011	1:25:26 PM	Helium MFC set to  0.000000
9/28/2011	1:25:26 PM	H2 MFC set to  500.000000
9/28/2011	1:25:26 PM	BCl3 MFC set to  0.000000
9/28/2011	1:25:26 PM	PHl3 MFC set to  0.000000
9/28/2011	1:25:26 PM	SiCl4 MFC set to  50.000000
9/28/2011	1:25:26 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	1:25:26 PM	Tube furnace set to 1000
9/28/2011	1:43:16 PM	Helium valve closed
9/28/2011	1:43:16 PM	BCl3 valve closed
9/28/2011	1:43:16 PM	PH3 valve closed
9/28/2011	1:43:16 PM	SiCl4 pre valve closed
9/28/2011	1:43:16 PM	SiCl4 post valve closed
9/28/2011	1:43:16 PM	Main Vac valve closed
9/28/2011	1:43:16 PM	Bypass valve closed
9/28/2011	1:43:16 PM	H2 valve opened
9/28/2011	1:43:16 PM	Bubbler valve opened
9/28/2011	1:43:16 PM	Helium MFC set to  0.000000
9/28/2011	1:43:16 PM	H2 MFC set to  500.000000
9/28/2011	1:43:16 PM	BCl3 MFC set to  0.000000
9/28/2011	1:43:16 PM	PHl3 MFC set to  0.000000
9/28/2011	1:43:16 PM	SiCl4 MFC set to  0.000000
9/28/2011	1:43:16 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	1:43:16 PM	Tube furnace set to 950
9/28/2011	1:43:18 PM	Helium valve closed
9/28/2011	1:43:18 PM	BCl3 valve closed
9/28/2011	1:43:18 PM	PH3 valve closed
9/28/2011	1:43:18 PM	SiCl4 pre valve closed
9/28/2011	1:43:18 PM	SiCl4 post valve closed
9/28/2011	1:43:18 PM	Main Vac valve closed
9/28/2011	1:43:18 PM	Bypass valve closed
9/28/2011	1:43:18 PM	H2 valve opened
9/28/2011	1:43:18 PM	Bubbler valve opened
9/28/2011	1:43:18 PM	Helium MFC set to  0.000000
9/28/2011	1:43:18 PM	H2 MFC set to  500.000000
9/28/2011	1:43:18 PM	BCl3 MFC set to  0.000000
9/28/2011	1:43:18 PM	PHl3 MFC set to  0.000000
9/28/2011	1:43:18 PM	SiCl4 MFC set to  0.000000
9/28/2011	1:43:18 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	1:43:18 PM	Tube furnace set to 850
9/28/2011	1:43:22 PM	H2 valve closed
9/28/2011	1:43:22 PM	BCl3 valve closed
9/28/2011	1:43:22 PM	PH3 valve closed
9/28/2011	1:43:22 PM	SiCl4 pre valve closed
9/28/2011	1:43:22 PM	SiCl4 post valve closed
9/28/2011	1:43:22 PM	Main Vac valve closed
9/28/2011	1:43:22 PM	Bypass valve closed
9/28/2011	1:43:22 PM	Helium valve opened
9/28/2011	1:43:22 PM	Bubbler valve opened
9/28/2011	1:43:22 PM	Helium MFC set to  500.000000
9/28/2011	1:43:22 PM	H2 MFC set to  0.000000
9/28/2011	1:43:22 PM	BCl3 MFC set to  0.000000
9/28/2011	1:43:22 PM	PHl3 MFC set to  0.000000
9/28/2011	1:43:22 PM	SiCl4 MFC set to  0.000000
9/28/2011	1:43:22 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	1:43:22 PM	Tube furnace set to 0
9/28/2011	1:49:01 PM	Helium valve closed
9/28/2011	1:49:01 PM	H2 valve closed
9/28/2011	1:49:01 PM	BCl3 valve closed
9/28/2011	1:49:01 PM	PH3 valve closed
9/28/2011	1:49:01 PM	SiCl4 pre valve closed
9/28/2011	1:49:01 PM	SiCl4 post valve closed
9/28/2011	1:49:01 PM	Main Vac valve closed
9/28/2011	1:49:01 PM	Bypass valve closed
9/28/2011	1:49:01 PM	Bubbler valve closed
9/28/2011	1:49:01 PM	Helium MFC set to  0.000000
9/28/2011	1:49:01 PM	H2 MFC set to  0.000000
9/28/2011	1:49:01 PM	BCl3 MFC set to  0.000000
9/28/2011	1:49:01 PM	PHl3 MFC set to  0.000000
9/28/2011	1:49:01 PM	SiCl4 MFC set to  0.000000
9/28/2011	1:49:01 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	1:49:01 PM	Tube furnace set to 0
9/28/2011	1:49:02 PM	Run finished at 1:49 PM
9/28/2011	1:49:06 PM	Bypass valve opened
9/28/2011	1:49:11 PM	Bypass valve closed
9/28/2011	1:49:14 PM	Bypass valve opened
9/28/2011	1:49:23 PM	Bypass valve closed
9/28/2011	1:49:30 PM	Bypass valve opened
9/28/2011	1:50:17 PM	SiCl4 post valve opened
9/28/2011	1:51:29 PM	Bypass valve closed
9/28/2011	1:51:30 PM	Main Vac valve opened
9/28/2011	1:51:51 PM	Main Vac valve closed
9/28/2011	1:52:06 PM	SiCl4 post valve closed
9/28/2011	1:52:07 PM	Bypass valve opened
9/28/2011	1:52:10 PM	Bypass valve closed
9/28/2011	1:52:10 PM	Main Vac valve opened
9/28/2011	1:58:23 PM	Main Vac valve closed
9/28/2011	2:48:32 PM	Bypass valve opened
9/28/2011	2:50:29 PM	Bypass valve closed
9/28/2011	2:50:29 PM	Main Vac valve opened
9/28/2011	2:51:11 PM	Main Vac valve closed
9/28/2011	3:39:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2011	3:39:06 PM	Recipe started at 3:39 PM
9/28/2011	3:39:06 PM	Helium valve closed
9/28/2011	3:39:06 PM	H2 valve closed
9/28/2011	3:39:06 PM	BCl3 valve closed
9/28/2011	3:39:06 PM	PH3 valve closed
9/28/2011	3:39:06 PM	SiCl4 pre valve closed
9/28/2011	3:39:06 PM	SiCl4 post valve closed
9/28/2011	3:39:06 PM	Main Vac valve closed
9/28/2011	3:39:06 PM	Bubbler valve closed
9/28/2011	3:39:06 PM	Bypass valve opened
9/28/2011	3:39:06 PM	Helium MFC set to  0.000000
9/28/2011	3:39:06 PM	H2 MFC set to  0.000000
9/28/2011	3:39:06 PM	BCl3 MFC set to  0.000000
9/28/2011	3:39:06 PM	PHl3 MFC set to  0.000000
9/28/2011	3:39:06 PM	SiCl4 MFC set to  0.000000
9/28/2011	3:39:06 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	3:39:06 PM	Tube furnace set to 0
9/28/2011	3:39:17 PM	Run aborted at 3:39 PM
9/28/2011	3:39:17 PM	Helium valve closed
9/28/2011	3:39:17 PM	H2 valve closed
9/28/2011	3:39:17 PM	BCl3 valve closed
9/28/2011	3:39:17 PM	PH3 valve closed
9/28/2011	3:39:17 PM	SiCl4 pre valve closed
9/28/2011	3:39:17 PM	SiCl4 post valve closed
9/28/2011	3:39:17 PM	Bypass valve closed
9/28/2011	3:39:17 PM	Main Vac valve closed
9/28/2011	3:39:17 PM	Bubbler valve closed
9/28/2011	3:39:17 PM	Helium MFC set to  0.000000
9/28/2011	3:39:17 PM	H2 MFC set to  0.000000
9/28/2011	3:39:17 PM	BCl3 MFC set to  0.000000
9/28/2011	3:39:17 PM	PHl3 MFC set to  0.000000
9/28/2011	3:39:17 PM	SiCl4 MFC set to  0.000000
9/28/2011	3:39:18 PM	Tube furnace set to 0
9/28/2011	3:39:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2011	3:39:20 PM	Bypass valve opened
9/28/2011	3:39:22 PM	SiCl4 post valve opened
9/28/2011	3:42:25 PM	Bypass valve closed
9/28/2011	3:42:25 PM	Main Vac valve opened
9/28/2011	4:05:59 PM	SiCl4 post valve closed
9/28/2011	4:06:16 PM	Helium MFC set to  500.000000
9/28/2011	4:06:21 PM	Main Vac valve closed
9/28/2011	4:06:23 PM	Helium valve opened
9/28/2011	4:06:25 PM	SiCl4 post valve opened
9/28/2011	4:06:33 PM	SiCl4 post valve closed
9/28/2011	4:06:34 PM	Helium valve closed
9/28/2011	4:06:35 PM	Bypass valve opened
9/28/2011	4:06:39 PM	SiCl4 post valve opened
9/28/2011	4:06:57 PM	Tube furnace set to 120
9/28/2011	4:07:32 PM	Bypass valve closed
9/28/2011	4:07:32 PM	Main Vac valve opened
9/28/2011	4:27:20 PM	SiCl4 post valve closed
9/28/2011	4:27:37 PM	SiCl4 post valve opened
9/28/2011	4:27:41 PM	Main Vac valve closed
9/28/2011	4:27:47 PM	Main Vac valve opened
9/28/2011	4:27:56 PM	Helium MFC set to  10.000000
9/28/2011	4:28:03 PM	SiCl4 MFC set to  10.000000
9/28/2011	4:28:08 PM	SiCl4 pre valve opened
9/28/2011	4:28:13 PM	SiCl4 pre valve closed
9/28/2011	4:28:52 PM	SiCl4 pre valve opened
9/28/2011	4:29:04 PM	SiCl4 pre valve closed
9/28/2011	4:29:08 PM	SiCl4 MFC set to  15.000000
9/28/2011	4:29:09 PM	SiCl4 pre valve opened
9/28/2011	4:29:21 PM	SiCl4 pre valve closed
9/28/2011	4:32:09 PM	SiCl4 pre valve opened
9/28/2011	4:32:22 PM	SiCl4 pre valve closed
9/28/2011	4:49:22 PM	SiCl4 pre valve opened
9/28/2011	4:49:38 PM	SiCl4 pre valve closed
9/28/2011	4:50:05 PM	Helium MFC set to  0.000000
9/28/2011	4:50:12 PM	H2 MFC set to  10.000000
9/28/2011	4:50:19 PM	H2 valve opened
9/28/2011	4:50:28 PM	H2 valve closed
9/28/2011	5:28:43 PM	H2 valve opened
9/28/2011	5:28:49 PM	H2 valve closed
9/28/2011	5:28:51 PM	SiCl4 pre valve opened
9/28/2011	5:29:30 PM	SiCl4 pre valve closed
9/28/2011	5:30:08 PM	SiCl4 pre valve opened
9/28/2011	5:30:47 PM	SiCl4 pre valve closed
9/28/2011	5:31:18 PM	Main Vac valve closed
9/28/2011	5:31:27 PM	Main Vac valve opened
9/28/2011	5:31:48 PM	Tube furnace set to 150
9/28/2011	5:35:13 PM	H2 valve opened
9/28/2011	5:35:22 PM	H2 valve closed
9/28/2011	5:35:24 PM	SiCl4 pre valve opened
9/28/2011	5:35:26 PM	SiCl4 pre valve closed
9/28/2011	5:52:48 PM	Main Vac valve closed
9/28/2011	5:52:48 PM	Main Vac valve opened
9/28/2011	5:52:51 PM	Main Vac valve closed
9/28/2011	5:53:15 PM	Main Vac valve opened
9/28/2011	6:02:48 PM	Tube furnace set to 180
9/28/2011	6:02:56 PM	SiCl4 pre valve opened
9/28/2011	6:03:06 PM	SiCl4 pre valve closed
9/28/2011	6:03:57 PM	Main Vac valve closed
9/28/2011	6:04:10 PM	Main Vac valve opened
9/28/2011	6:04:20 PM	H2 valve opened
9/28/2011	6:04:26 PM	H2 valve closed
9/28/2011	6:05:30 PM	SiCl4 post valve closed
9/28/2011	6:05:50 PM	SiCl4 post valve opened
9/28/2011	6:21:14 PM	Main Vac valve closed
9/28/2011	6:21:28 PM	Main Vac valve opened
9/28/2011	6:24:12 PM	Main Vac valve closed
9/28/2011	6:24:50 PM	SiCl4 post valve closed
9/28/2011	6:28:03 PM	Main Vac valve opened
9/28/2011	6:28:04 PM	SiCl4 post valve opened
9/28/2011	6:31:55 PM	SiCl4 post valve closed
9/28/2011	6:31:56 PM	Main Vac valve closed
9/28/2011	6:38:21 PM	Main Vac valve opened
9/28/2011	6:38:22 PM	SiCl4 post valve opened
9/28/2011	6:57:21 PM	Main Vac valve closed
9/28/2011	6:57:34 PM	Main Vac valve opened
9/28/2011	7:04:50 PM	Tube furnace set to 0
9/28/2011	7:07:42 PM	Main Vac valve closed
9/28/2011	7:08:02 PM	Main Vac valve opened
9/28/2011	7:08:07 PM	SiCl4 post valve closed
9/28/2011	7:08:14 PM	Main Vac valve closed
9/28/2011	7:08:37 PM	Main Vac valve opened
9/28/2011	7:08:38 PM	SiCl4 post valve opened
9/28/2011	7:09:27 PM	SiCl4 MFC set to  20.000000
9/28/2011	7:09:28 PM	SiCl4 pre valve opened
9/28/2011	7:09:49 PM	SiCl4 pre valve closed
9/28/2011	7:26:43 PM	Main Vac valve closed
9/28/2011	7:27:12 PM	Main Vac valve opened
9/28/2011	7:49:17 PM	SiCl4 pre valve opened
9/28/2011	7:49:30 PM	SiCl4 pre valve closed
9/28/2011	7:51:14 PM	Tube furnace set to 200
9/28/2011	7:51:29 PM	Main Vac valve closed
9/28/2011	7:51:56 PM	Main Vac valve opened
9/28/2011	8:00:39 PM	Tube furnace set to 0
9/28/2011	8:03:25 PM	Main Vac valve closed
9/28/2011	8:03:28 PM	SiCl4 pre valve opened
9/28/2011	8:03:39 PM	SiCl4 MFC set to  100.000000
9/28/2011	8:03:57 PM	Helium MFC set to  500.000000
9/28/2011	8:04:00 PM	Helium valve opened
9/28/2011	8:04:58 PM	Helium valve closed
9/28/2011	8:04:59 PM	SiCl4 pre valve closed
9/28/2011	8:05:14 PM	SiCl4 pre valve opened
9/28/2011	8:05:19 PM	Helium valve opened
9/28/2011	8:05:20 PM	Helium valve closed
9/28/2011	8:05:20 PM	H2 valve closed
9/28/2011	8:05:20 PM	BCl3 valve closed
9/28/2011	8:05:20 PM	PH3 valve closed
9/28/2011	8:05:20 PM	SiCl4 pre valve closed
9/28/2011	8:05:20 PM	SiCl4 post valve closed
9/28/2011	8:05:20 PM	Main Vac valve closed
9/28/2011	8:05:20 PM	Bubbler valve closed
9/28/2011	8:05:20 PM	Bypass valve closed
9/28/2011	8:05:20 PM	Helium MFC set to  0.000000
9/28/2011	8:05:20 PM	H2 MFC set to  0.000000
9/28/2011	8:05:20 PM	BCl3 MFC set to  0.000000
9/28/2011	8:05:20 PM	PHl3 MFC set to  0.000000
9/28/2011	8:05:20 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:20 PM	Bypass solenoid MFC set to  760.000000
9/28/2011	8:05:21 PM	Tube furnace set to 0
9/28/2011	8:05:21 PM	Baratron reads 900.567492 Torr.  Emergency exit.
9/28/2011	8:05:21 PM	Program exited cleanly
9/28/2011	8:05:23 PM	Program started normally
9/28/2011	8:05:23 PM	Helium valve closed
9/28/2011	8:05:23 PM	H2 valve closed
9/28/2011	8:05:23 PM	BCl3 valve closed
9/28/2011	8:05:23 PM	PH3 valve closed
9/28/2011	8:05:23 PM	SiCl4 pre valve closed
9/28/2011	8:05:23 PM	SiCl4 post valve closed
9/28/2011	8:05:23 PM	Main Vac valve closed
9/28/2011	8:05:23 PM	Bypass valve closed
9/28/2011	8:05:23 PM	Bubbler valve closed
9/28/2011	8:05:23 PM	Helium MFC set to  0.000000
9/28/2011	8:05:23 PM	H2 MFC set to  0.000000
9/28/2011	8:05:23 PM	BCl3 MFC set to  0.000000
9/28/2011	8:05:23 PM	PHl3 MFC set to  0.000000
9/28/2011	8:05:23 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:23 PM	Bypass solenoid MFC set to  760.000000
9/28/2011	8:05:23 PM	Tube furnace set to 0
9/28/2011	8:05:24 PM	Helium valve closed
9/28/2011	8:05:24 PM	H2 valve closed
9/28/2011	8:05:24 PM	BCl3 valve closed
9/28/2011	8:05:24 PM	PH3 valve closed
9/28/2011	8:05:24 PM	SiCl4 pre valve closed
9/28/2011	8:05:24 PM	SiCl4 post valve closed
9/28/2011	8:05:24 PM	Main Vac valve closed
9/28/2011	8:05:24 PM	Bubbler valve closed
9/28/2011	8:05:24 PM	Bypass valve closed
9/28/2011	8:05:24 PM	Helium MFC set to  0.000000
9/28/2011	8:05:24 PM	H2 MFC set to  0.000000
9/28/2011	8:05:24 PM	BCl3 MFC set to  0.000000
9/28/2011	8:05:24 PM	PHl3 MFC set to  0.000000
9/28/2011	8:05:24 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:24 PM	Bypass solenoid MFC set to  760.000000
9/28/2011	8:05:24 PM	Tube furnace set to 0
9/28/2011	8:05:24 PM	Baratron reads 902.609148 Torr.  Emergency exit.
9/28/2011	8:05:25 PM	Program exited cleanly
9/28/2011	8:05:26 PM	Program started normally
9/28/2011	8:05:26 PM	Helium valve closed
9/28/2011	8:05:26 PM	H2 valve closed
9/28/2011	8:05:26 PM	BCl3 valve closed
9/28/2011	8:05:26 PM	PH3 valve closed
9/28/2011	8:05:27 PM	SiCl4 pre valve closed
9/28/2011	8:05:27 PM	SiCl4 post valve closed
9/28/2011	8:05:27 PM	Main Vac valve closed
9/28/2011	8:05:27 PM	Bypass valve closed
9/28/2011	8:05:27 PM	Bubbler valve closed
9/28/2011	8:05:27 PM	Helium MFC set to  0.000000
9/28/2011	8:05:27 PM	H2 MFC set to  0.000000
9/28/2011	8:05:27 PM	BCl3 MFC set to  0.000000
9/28/2011	8:05:27 PM	PHl3 MFC set to  0.000000
9/28/2011	8:05:27 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:27 PM	Bypass solenoid MFC set to  760.000000
9/28/2011	8:05:27 PM	Tube furnace set to 0
9/28/2011	8:05:27 PM	Helium valve closed
9/28/2011	8:05:27 PM	H2 valve closed
9/28/2011	8:05:27 PM	BCl3 valve closed
9/28/2011	8:05:27 PM	PH3 valve closed
9/28/2011	8:05:27 PM	SiCl4 pre valve closed
9/28/2011	8:05:27 PM	SiCl4 post valve closed
9/28/2011	8:05:27 PM	Main Vac valve closed
9/28/2011	8:05:27 PM	Bubbler valve closed
9/28/2011	8:05:27 PM	Bypass valve closed
9/28/2011	8:05:27 PM	Helium MFC set to  0.000000
9/28/2011	8:05:27 PM	H2 MFC set to  0.000000
9/28/2011	8:05:27 PM	BCl3 MFC set to  0.000000
9/28/2011	8:05:27 PM	PHl3 MFC set to  0.000000
9/28/2011	8:05:27 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:27 PM	Bypass solenoid MFC set to  760.000000
9/28/2011	8:05:27 PM	Tube furnace set to 0
9/28/2011	8:05:27 PM	Baratron reads 902.609148 Torr.  Emergency exit.
9/28/2011	8:05:28 PM	Program exited cleanly
9/28/2011	8:05:30 PM	Program started normally
9/28/2011	8:05:30 PM	Helium valve closed
9/28/2011	8:05:30 PM	H2 valve closed
9/28/2011	8:05:30 PM	BCl3 valve closed
9/28/2011	8:05:30 PM	PH3 valve closed
9/28/2011	8:05:30 PM	SiCl4 pre valve closed
9/28/2011	8:05:30 PM	SiCl4 post valve closed
9/28/2011	8:05:30 PM	Main Vac valve closed
9/28/2011	8:05:30 PM	Bypass valve closed
9/28/2011	8:05:30 PM	Bubbler valve closed
9/28/2011	8:05:30 PM	Helium MFC set to  0.000000
9/28/2011	8:05:30 PM	H2 MFC set to  0.000000
9/28/2011	8:05:30 PM	BCl3 MFC set to  0.000000
9/28/2011	8:05:30 PM	PHl3 MFC set to  0.000000
9/28/2011	8:05:30 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:30 PM	Bypass solenoid MFC set to  760.000000
9/28/2011	8:05:31 PM	Tube furnace set to 0
9/28/2011	8:05:31 PM	Helium valve closed
9/28/2011	8:05:31 PM	H2 valve closed
9/28/2011	8:05:31 PM	BCl3 valve closed
9/28/2011	8:05:31 PM	PH3 valve closed
9/28/2011	8:05:31 PM	SiCl4 pre valve closed
9/28/2011	8:05:31 PM	SiCl4 post valve closed
9/28/2011	8:05:31 PM	Main Vac valve closed
9/28/2011	8:05:31 PM	Bubbler valve closed
9/28/2011	8:05:31 PM	Bypass valve closed
9/28/2011	8:05:31 PM	Helium MFC set to  0.000000
9/28/2011	8:05:31 PM	H2 MFC set to  0.000000
9/28/2011	8:05:31 PM	BCl3 MFC set to  0.000000
9/28/2011	8:05:31 PM	PHl3 MFC set to  0.000000
9/28/2011	8:05:31 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:31 PM	Bypass solenoid MFC set to  760.000000
9/28/2011	8:05:31 PM	Tube furnace set to 0
9/28/2011	8:05:31 PM	Baratron reads 902.609148 Torr.  Emergency exit.
9/28/2011	8:05:33 PM	Program exited cleanly
9/28/2011	8:05:35 PM	Program started normally
9/28/2011	8:05:35 PM	Helium valve closed
9/28/2011	8:05:35 PM	H2 valve closed
9/28/2011	8:05:35 PM	BCl3 valve closed
9/28/2011	8:05:35 PM	PH3 valve closed
9/28/2011	8:05:35 PM	SiCl4 pre valve closed
9/28/2011	8:05:35 PM	SiCl4 post valve closed
9/28/2011	8:05:35 PM	Main Vac valve closed
9/28/2011	8:05:35 PM	Bypass valve closed
9/28/2011	8:05:35 PM	Bubbler valve closed
9/28/2011	8:05:35 PM	Helium MFC set to  0.000000
9/28/2011	8:05:35 PM	H2 MFC set to  0.000000
9/28/2011	8:05:35 PM	BCl3 MFC set to  0.000000
9/28/2011	8:05:35 PM	PHl3 MFC set to  0.000000
9/28/2011	8:05:35 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:35 PM	Bypass solenoid MFC set to  760.000000
9/28/2011	8:05:35 PM	Tube furnace set to 0
9/28/2011	8:05:35 PM	Helium valve closed
9/28/2011	8:05:35 PM	H2 valve closed
9/28/2011	8:05:35 PM	BCl3 valve closed
9/28/2011	8:05:35 PM	PH3 valve closed
9/28/2011	8:05:35 PM	SiCl4 pre valve closed
9/28/2011	8:05:35 PM	SiCl4 post valve closed
9/28/2011	8:05:35 PM	Main Vac valve closed
9/28/2011	8:05:35 PM	Bubbler valve closed
9/28/2011	8:05:35 PM	Bypass valve closed
9/28/2011	8:05:35 PM	Helium MFC set to  0.000000
9/28/2011	8:05:35 PM	H2 MFC set to  0.000000
9/28/2011	8:05:35 PM	BCl3 MFC set to  0.000000
9/28/2011	8:05:35 PM	PHl3 MFC set to  0.000000
9/28/2011	8:05:35 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:35 PM	Bypass solenoid MFC set to  760.000000
9/28/2011	8:05:35 PM	Tube furnace set to 0
9/28/2011	8:05:35 PM	Baratron reads 901.588320 Torr.  Emergency exit.
9/28/2011	8:05:36 PM	Program exited cleanly
9/28/2011	8:05:38 PM	Program started normally
9/28/2011	8:05:38 PM	Helium valve closed
9/28/2011	8:05:38 PM	H2 valve closed
9/28/2011	8:05:38 PM	BCl3 valve closed
9/28/2011	8:05:38 PM	PH3 valve closed
9/28/2011	8:05:38 PM	SiCl4 pre valve closed
9/28/2011	8:05:38 PM	SiCl4 post valve closed
9/28/2011	8:05:38 PM	Main Vac valve closed
9/28/2011	8:05:38 PM	Bypass valve closed
9/28/2011	8:05:38 PM	Bubbler valve closed
9/28/2011	8:05:38 PM	Helium MFC set to  0.000000
9/28/2011	8:05:38 PM	H2 MFC set to  0.000000
9/28/2011	8:05:38 PM	BCl3 MFC set to  0.000000
9/28/2011	8:05:38 PM	PHl3 MFC set to  0.000000
9/28/2011	8:05:38 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:38 PM	Bypass solenoid MFC set to  760.000000
9/28/2011	8:05:38 PM	Tube furnace set to 0
9/28/2011	8:05:39 PM	Helium valve closed
9/28/2011	8:05:39 PM	H2 valve closed
9/28/2011	8:05:39 PM	BCl3 valve closed
9/28/2011	8:05:39 PM	PH3 valve closed
9/28/2011	8:05:39 PM	SiCl4 pre valve closed
9/28/2011	8:05:39 PM	SiCl4 post valve closed
9/28/2011	8:05:39 PM	Main Vac valve closed
9/28/2011	8:05:39 PM	Bubbler valve closed
9/28/2011	8:05:39 PM	Bypass valve closed
9/28/2011	8:05:39 PM	Helium MFC set to  0.000000
9/28/2011	8:05:39 PM	H2 MFC set to  0.000000
9/28/2011	8:05:39 PM	BCl3 MFC set to  0.000000
9/28/2011	8:05:39 PM	PHl3 MFC set to  0.000000
9/28/2011	8:05:39 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:39 PM	Bypass solenoid MFC set to  760.000000
9/28/2011	8:05:39 PM	Tube furnace set to 0
9/28/2011	8:05:39 PM	Baratron reads 901.588320 Torr.  Emergency exit.
9/28/2011	8:05:40 PM	Program exited cleanly
9/28/2011	8:05:47 PM	Program started normally
9/28/2011	8:05:47 PM	Helium valve closed
9/28/2011	8:05:47 PM	H2 valve closed
9/28/2011	8:05:47 PM	BCl3 valve closed
9/28/2011	8:05:47 PM	PH3 valve closed
9/28/2011	8:05:47 PM	SiCl4 pre valve closed
9/28/2011	8:05:47 PM	SiCl4 post valve closed
9/28/2011	8:05:47 PM	Main Vac valve closed
9/28/2011	8:05:47 PM	Bypass valve closed
9/28/2011	8:05:47 PM	Bubbler valve closed
9/28/2011	8:05:47 PM	Helium MFC set to  0.000000
9/28/2011	8:05:47 PM	H2 MFC set to  0.000000
9/28/2011	8:05:47 PM	BCl3 MFC set to  0.000000
9/28/2011	8:05:47 PM	PHl3 MFC set to  0.000000
9/28/2011	8:05:47 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:05:47 PM	Bypass solenoid MFC set to  760.000000
9/28/2011	8:05:47 PM	Tube furnace set to 0
9/28/2011	8:05:49 PM	Bypass valve opened
9/28/2011	8:05:50 PM	Bypass valve closed
9/28/2011	8:06:04 PM	SiCl4 MFC set to  100.000000
9/28/2011	8:06:05 PM	SiCl4 pre valve opened
9/28/2011	8:06:06 PM	SiCl4 post valve opened
9/28/2011	8:06:15 PM	Helium MFC set to  50.000000
9/28/2011	8:06:16 PM	Helium valve opened
9/28/2011	8:06:37 PM	Helium valve closed
9/28/2011	8:06:38 PM	SiCl4 pre valve closed
9/28/2011	8:07:07 PM	SiCl4 MFC set to  5.000000
9/28/2011	8:07:10 PM	SiCl4 pre valve opened
9/28/2011	8:07:11 PM	SiCl4 pre valve closed
9/28/2011	8:07:12 PM	SiCl4 pre valve opened
9/28/2011	8:07:16 PM	SiCl4 pre valve closed
9/28/2011	8:07:23 PM	SiCl4 MFC set to  15.000000
9/28/2011	8:07:24 PM	SiCl4 pre valve opened
9/28/2011	8:07:33 PM	SiCl4 pre valve closed
9/28/2011	8:07:36 PM	SiCl4 MFC set to  100.000000
9/28/2011	8:07:37 PM	SiCl4 pre valve opened
9/28/2011	8:07:46 PM	SiCl4 pre valve closed
9/28/2011	8:07:47 PM	SiCl4 pre valve opened
9/28/2011	8:07:49 PM	SiCl4 pre valve closed
9/28/2011	8:07:50 PM	SiCl4 pre valve opened
9/28/2011	8:07:55 PM	SiCl4 pre valve closed
9/28/2011	8:07:56 PM	SiCl4 pre valve opened
9/28/2011	8:07:59 PM	SiCl4 pre valve closed
9/28/2011	8:08:32 PM	SiCl4 pre valve opened
9/28/2011	8:08:34 PM	SiCl4 pre valve closed
9/28/2011	8:09:52 PM	SiCl4 post valve closed
9/28/2011	8:10:04 PM	Bypass valve opened
9/28/2011	8:11:03 PM	Bypass valve closed
9/28/2011	8:11:03 PM	Main Vac valve opened
9/28/2011	8:11:09 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:11:12 PM	Helium MFC set to  0.000000
9/28/2011	8:11:50 PM	H2 MFC set to  15.000000
9/28/2011	8:11:51 PM	H2 valve opened
9/28/2011	8:11:54 PM	H2 valve closed
9/28/2011	8:12:43 PM	Recipe started at 8:12 PM
9/28/2011	8:12:43 PM	Helium valve closed
9/28/2011	8:12:43 PM	H2 valve closed
9/28/2011	8:12:43 PM	BCl3 valve closed
9/28/2011	8:12:43 PM	PH3 valve closed
9/28/2011	8:12:43 PM	SiCl4 pre valve closed
9/28/2011	8:12:43 PM	SiCl4 post valve closed
9/28/2011	8:12:43 PM	Bypass valve closed
9/28/2011	8:12:43 PM	Bubbler valve closed
9/28/2011	8:12:43 PM	Main Vac valve opened
9/28/2011	8:12:43 PM	Helium MFC set to  0.000000
9/28/2011	8:12:43 PM	H2 MFC set to  15.000000
9/28/2011	8:12:43 PM	BCl3 MFC set to  0.000000
9/28/2011	8:12:43 PM	PHl3 MFC set to  0.000000
9/28/2011	8:12:43 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:12:43 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:12:44 PM	Tube furnace set to 0
9/28/2011	8:12:44 PM	Run finished at 8:12 PM
9/28/2011	8:13:12 PM	Recipe started at 8:13 PM
9/28/2011	8:13:12 PM	Helium valve closed
9/28/2011	8:13:12 PM	H2 valve closed
9/28/2011	8:13:12 PM	BCl3 valve closed
9/28/2011	8:13:12 PM	PH3 valve closed
9/28/2011	8:13:12 PM	SiCl4 pre valve closed
9/28/2011	8:13:12 PM	SiCl4 post valve closed
9/28/2011	8:13:12 PM	Main Vac valve closed
9/28/2011	8:13:12 PM	Bypass valve closed
9/28/2011	8:13:12 PM	Bubbler valve closed
9/28/2011	8:13:12 PM	Helium MFC set to  0.000000
9/28/2011	8:13:12 PM	H2 MFC set to  0.000000
9/28/2011	8:13:12 PM	BCl3 MFC set to  0.000000
9/28/2011	8:13:12 PM	PHl3 MFC set to  0.000000
9/28/2011	8:13:12 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:13:12 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:13:12 PM	Tube furnace set to 0
9/28/2011	8:13:15 PM	Helium valve closed
9/28/2011	8:13:15 PM	BCl3 valve closed
9/28/2011	8:13:15 PM	PH3 valve closed
9/28/2011	8:13:15 PM	SiCl4 pre valve closed
9/28/2011	8:13:15 PM	SiCl4 post valve closed
9/28/2011	8:13:15 PM	Main Vac valve closed
9/28/2011	8:13:15 PM	Bypass valve closed
9/28/2011	8:13:15 PM	Bubbler valve closed
9/28/2011	8:13:15 PM	H2 valve opened
9/28/2011	8:13:15 PM	Helium MFC set to  0.000000
9/28/2011	8:13:15 PM	H2 MFC set to  500.000000
9/28/2011	8:13:15 PM	BCl3 MFC set to  0.000000
9/28/2011	8:13:15 PM	PHl3 MFC set to  0.000000
9/28/2011	8:13:15 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:13:15 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:13:16 PM	Tube furnace set to 0
9/28/2011	8:14:23 PM	Helium valve closed
9/28/2011	8:14:23 PM	BCl3 valve closed
9/28/2011	8:14:23 PM	PH3 valve closed
9/28/2011	8:14:23 PM	SiCl4 pre valve closed
9/28/2011	8:14:23 PM	SiCl4 post valve closed
9/28/2011	8:14:23 PM	Main Vac valve closed
9/28/2011	8:14:23 PM	Bypass valve closed
9/28/2011	8:14:23 PM	H2 valve opened
9/28/2011	8:14:23 PM	Bubbler valve opened
9/28/2011	8:14:23 PM	Helium MFC set to  0.000000
9/28/2011	8:14:23 PM	H2 MFC set to  500.000000
9/28/2011	8:14:23 PM	BCl3 MFC set to  0.000000
9/28/2011	8:14:23 PM	PHl3 MFC set to  0.000000
9/28/2011	8:14:23 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:14:23 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:14:23 PM	Tube furnace set to 0
9/28/2011	8:14:24 PM	Helium valve closed
9/28/2011	8:14:24 PM	BCl3 valve closed
9/28/2011	8:14:24 PM	PH3 valve closed
9/28/2011	8:14:24 PM	SiCl4 pre valve closed
9/28/2011	8:14:24 PM	SiCl4 post valve closed
9/28/2011	8:14:24 PM	Main Vac valve closed
9/28/2011	8:14:24 PM	Bypass valve closed
9/28/2011	8:14:24 PM	H2 valve opened
9/28/2011	8:14:24 PM	Bubbler valve opened
9/28/2011	8:14:24 PM	Helium MFC set to  0.000000
9/28/2011	8:14:24 PM	H2 MFC set to  500.000000
9/28/2011	8:14:24 PM	BCl3 MFC set to  0.000000
9/28/2011	8:14:24 PM	PHl3 MFC set to  0.000000
9/28/2011	8:14:24 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:14:24 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:14:24 PM	Tube furnace set to 1000
9/28/2011	8:34:25 PM	Helium valve closed
9/28/2011	8:34:25 PM	BCl3 valve closed
9/28/2011	8:34:25 PM	PH3 valve closed
9/28/2011	8:34:25 PM	Main Vac valve closed
9/28/2011	8:34:25 PM	Bypass valve closed
9/28/2011	8:34:25 PM	H2 valve opened
9/28/2011	8:34:25 PM	SiCl4 pre valve opened
9/28/2011	8:34:25 PM	SiCl4 post valve opened
9/28/2011	8:34:25 PM	Bubbler valve opened
9/28/2011	8:34:25 PM	Helium MFC set to  0.000000
9/28/2011	8:34:25 PM	H2 MFC set to  500.000000
9/28/2011	8:34:25 PM	BCl3 MFC set to  0.000000
9/28/2011	8:34:25 PM	PHl3 MFC set to  0.000000
9/28/2011	8:34:25 PM	SiCl4 MFC set to  50.000000
9/28/2011	8:34:25 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:34:25 PM	Tube furnace set to 1000
9/28/2011	8:54:25 PM	Helium valve closed
9/28/2011	8:54:25 PM	BCl3 valve closed
9/28/2011	8:54:25 PM	PH3 valve closed
9/28/2011	8:54:25 PM	SiCl4 pre valve closed
9/28/2011	8:54:25 PM	SiCl4 post valve closed
9/28/2011	8:54:25 PM	Main Vac valve closed
9/28/2011	8:54:25 PM	Bypass valve closed
9/28/2011	8:54:25 PM	H2 valve opened
9/28/2011	8:54:25 PM	Bubbler valve opened
9/28/2011	8:54:25 PM	Helium MFC set to  0.000000
9/28/2011	8:54:25 PM	H2 MFC set to  500.000000
9/28/2011	8:54:25 PM	BCl3 MFC set to  0.000000
9/28/2011	8:54:25 PM	PHl3 MFC set to  0.000000
9/28/2011	8:54:25 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:54:25 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:54:25 PM	Tube furnace set to 950
9/28/2011	8:58:57 PM	Helium valve closed
9/28/2011	8:58:57 PM	BCl3 valve closed
9/28/2011	8:58:57 PM	PH3 valve closed
9/28/2011	8:58:57 PM	SiCl4 pre valve closed
9/28/2011	8:58:57 PM	SiCl4 post valve closed
9/28/2011	8:58:57 PM	Main Vac valve closed
9/28/2011	8:58:57 PM	Bypass valve closed
9/28/2011	8:58:57 PM	H2 valve opened
9/28/2011	8:58:57 PM	Bubbler valve opened
9/28/2011	8:58:57 PM	Helium MFC set to  0.000000
9/28/2011	8:58:57 PM	H2 MFC set to  500.000000
9/28/2011	8:58:57 PM	BCl3 MFC set to  0.000000
9/28/2011	8:58:57 PM	PHl3 MFC set to  0.000000
9/28/2011	8:58:57 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:58:57 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:58:57 PM	Tube furnace set to 850
9/28/2011	8:58:58 PM	H2 valve closed
9/28/2011	8:58:58 PM	BCl3 valve closed
9/28/2011	8:58:58 PM	PH3 valve closed
9/28/2011	8:58:58 PM	SiCl4 pre valve closed
9/28/2011	8:58:58 PM	SiCl4 post valve closed
9/28/2011	8:58:58 PM	Main Vac valve closed
9/28/2011	8:58:58 PM	Bypass valve closed
9/28/2011	8:58:58 PM	Helium valve opened
9/28/2011	8:58:58 PM	Bubbler valve opened
9/28/2011	8:58:58 PM	Helium MFC set to  500.000000
9/28/2011	8:58:58 PM	H2 MFC set to  0.000000
9/28/2011	8:58:58 PM	BCl3 MFC set to  0.000000
9/28/2011	8:58:58 PM	PHl3 MFC set to  0.000000
9/28/2011	8:58:58 PM	SiCl4 MFC set to  0.000000
9/28/2011	8:58:58 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	8:58:58 PM	Tube furnace set to 0
9/28/2011	9:26:39 PM	Helium valve closed
9/28/2011	9:26:39 PM	H2 valve closed
9/28/2011	9:26:39 PM	BCl3 valve closed
9/28/2011	9:26:39 PM	PH3 valve closed
9/28/2011	9:26:39 PM	SiCl4 pre valve closed
9/28/2011	9:26:39 PM	SiCl4 post valve closed
9/28/2011	9:26:39 PM	Main Vac valve closed
9/28/2011	9:26:39 PM	Bypass valve closed
9/28/2011	9:26:39 PM	Bubbler valve closed
9/28/2011	9:26:39 PM	Helium MFC set to  0.000000
9/28/2011	9:26:39 PM	H2 MFC set to  0.000000
9/28/2011	9:26:39 PM	BCl3 MFC set to  0.000000
9/28/2011	9:26:39 PM	PHl3 MFC set to  0.000000
9/28/2011	9:26:39 PM	SiCl4 MFC set to  0.000000
9/28/2011	9:26:39 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:26:39 PM	Tube furnace set to 0
9/28/2011	9:26:40 PM	Run finished at 9:26 PM
9/28/2011	9:26:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2011	9:26:44 PM	Recipe started at 9:26 PM
9/28/2011	9:26:44 PM	Helium valve closed
9/28/2011	9:26:44 PM	H2 valve closed
9/28/2011	9:26:44 PM	BCl3 valve closed
9/28/2011	9:26:44 PM	PH3 valve closed
9/28/2011	9:26:44 PM	SiCl4 pre valve closed
9/28/2011	9:26:44 PM	SiCl4 post valve closed
9/28/2011	9:26:44 PM	Main Vac valve closed
9/28/2011	9:26:44 PM	Bubbler valve closed
9/28/2011	9:26:44 PM	Bypass valve opened
9/28/2011	9:26:44 PM	Helium MFC set to  0.000000
9/28/2011	9:26:44 PM	H2 MFC set to  0.000000
9/28/2011	9:26:44 PM	BCl3 MFC set to  0.000000
9/28/2011	9:26:44 PM	PHl3 MFC set to  0.000000
9/28/2011	9:26:44 PM	SiCl4 MFC set to  0.000000
9/28/2011	9:26:44 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:26:44 PM	Tube furnace set to 0
9/28/2011	9:27:39 PM	Helium valve closed
9/28/2011	9:27:39 PM	H2 valve closed
9/28/2011	9:27:39 PM	BCl3 valve closed
9/28/2011	9:27:39 PM	PH3 valve closed
9/28/2011	9:27:39 PM	SiCl4 pre valve closed
9/28/2011	9:27:39 PM	SiCl4 post valve closed
9/28/2011	9:27:39 PM	Main Vac valve closed
9/28/2011	9:27:39 PM	Bubbler valve closed
9/28/2011	9:27:39 PM	Bypass valve opened
9/28/2011	9:27:39 PM	Helium MFC set to  0.000000
9/28/2011	9:27:39 PM	H2 MFC set to  0.000000
9/28/2011	9:27:39 PM	BCl3 MFC set to  0.000000
9/28/2011	9:27:39 PM	PHl3 MFC set to  0.000000
9/28/2011	9:27:39 PM	SiCl4 MFC set to  0.000000
9/28/2011	9:27:39 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:27:39 PM	Tube furnace set to 0
9/28/2011	9:27:59 PM	Helium valve closed
9/28/2011	9:27:59 PM	H2 valve closed
9/28/2011	9:27:59 PM	BCl3 valve closed
9/28/2011	9:27:59 PM	PH3 valve closed
9/28/2011	9:27:59 PM	SiCl4 pre valve closed
9/28/2011	9:27:59 PM	SiCl4 post valve closed
9/28/2011	9:27:59 PM	Bypass valve closed
9/28/2011	9:27:59 PM	Bubbler valve closed
9/28/2011	9:27:59 PM	Main Vac valve opened
9/28/2011	9:27:59 PM	Helium MFC set to  0.000000
9/28/2011	9:27:59 PM	H2 MFC set to  0.000000
9/28/2011	9:27:59 PM	BCl3 MFC set to  0.000000
9/28/2011	9:27:59 PM	PHl3 MFC set to  0.000000
9/28/2011	9:27:59 PM	SiCl4 MFC set to  0.000000
9/28/2011	9:27:59 PM	Bypass solenoid MFC set to  0.000000
9/28/2011	9:28:00 PM	Tube furnace set to 0
9/28/2011	9:28:01 PM	Run finished at 9:28 PM
9/28/2011	9:28:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
